High-resolution orthogonal patterning of organics

有机物的高分辨率正交图案

• 批准号: EP/G065586/1
• 负责人: Henning Sirringhaus
• 金额: $ 50.49万
• 依托单位: University of Cambridge
• 依托单位国家: 英国
• 项目类别: Research Grant
• 财政年份: 2009
• 资助国家: 英国
• 起止时间: 2009 至 无数据
• 项目状态: 已结题
• 来源: https://gtr.ukri.org/projects?ref=EP%2FG065586%2F1
• 关键词: resolution; orthogonal; patterning; organics

Organic electronics is a fast developing branch of modern science and technology that can complement conventional inorganic materials with lightweight, inexpensive, and mechanically flexible organic semiconductors. One of the key advantages of organic electronic materials lies in the low temperature, high-throughput device fabrication they enable. The solution-based fabrication of a variety of devices such as organic light emitting diodes (LEDs), field-effect transistors (FETs), solar cells, and sensors has been demonstrated using spin coating, ink-jet printing, and other wet printing techniques. While substantial improvements in materials synthesis, purification and deposition techniques over the past two decades enhanced film quality, uniformity, and environmental stability, the chemical processing of organic electronic materials remains one of the main challenges to be overcome. By chemical processing we mean any chemical treatment such as cleaning, depositing a second layer from solution to form multilayer devices, and depositing/developing resist layers for photolithographic patterning. The latter has, over the many decades of its development, grown into the dominant patterning technique in the semiconductor industry, for a number of important reasons. It offers an impressive combination of high resolution, precise registration, tight critical-dimension control, parallel throughput and the ability to cover large areas as demonstrated in the manufacture of LCD backplanes on glass sheets the size of a king bed. While cutting-edge photolithography equipment is very expensive, last generation technology is affordable and forecast to make an impact in organic electronics, especially given that alternative technologies such as inkjet printing are still largely unproven for large-scale manufacture.This project aims to leverage orthogonal lithography in order to create unique device architectures that will elucidate the fundamentals of organic electronic materials. Key research opportunities such as the ability to probe charge transport in a single crystalline domain of a conjugated polymer will be the focus of the proposed research. Orthogonal lithography, a breakthrough patterning process for organic electronic materials involves the use of resists soluble in fluorous solvents and resulted from a successful Materials World Network Project. Orthogonal lithography will be used to make complex, multilayer organic semiconductor devices not possible by other means. This will enable new fundamental studies to elucidate aspects of the physics of organic electronic devices which cannot be studies in more conventional structures.

有机电子学是现代科学技术的一个快速发展的分支，它可以用重量轻、价格低廉、机械柔性的有机半导体来补充传统的无机材料。有机电子材料的关键优势之一在于它们能够实现低温、高通量的器件制造。已经使用旋涂、喷墨印刷和其他湿法印刷技术证明了各种器件（诸如有机发光二极管（LED）、场效应晶体管（FET）、太阳能电池和传感器）的基于溶液的制造。虽然在过去的二十年中，材料合成、纯化和沉积技术的实质性改进提高了薄膜质量、均匀性和环境稳定性，但有机电子材料的化学加工仍然是有待克服的主要挑战之一。化学处理是指任何化学处理，例如清洁、从溶液中沉积第二层以形成多层器件、以及沉积/显影用于光刻图案化的抗蚀剂层。由于许多重要的原因，后者在其发展的几十年中已经成长为半导体工业中的主导图案化技术。它提供了一个令人印象深刻的高分辨率，精确的注册，严格的关键尺寸控制，并行吞吐量和覆盖大面积的能力，如在一个特大床大小的玻璃板上的LCD背板的制造证明。虽然先进的光刻设备非常昂贵，但上一代技术价格实惠，预计将在有机电子领域产生影响，特别是考虑到喷墨打印等替代技术在很大程度上尚未得到大规模生产的验证。本项目旨在利用正交光刻技术创建独特的器件架构，阐明有机电子材料的基本原理。关键的研究机会，如在共轭聚合物的单晶结构域中探测电荷传输的能力将是拟议研究的重点。正交光刻是一种有机电子材料图形化的突破性工艺，它涉及到使用可溶于氟溶剂的抗蚀剂，并由成功的材料世界网络项目产生。正交光刻将用于制造复杂的多层有机半导体器件，这是其他方法无法实现的。这将使新的基础研究能够阐明有机电子器件物理学的各个方面，而这些方面不能在更传统的结构中进行研究。

项目成果

Conjugated-Polymer-Based Lateral Heterostructures Defined by High-Resolution Photolithography

• DOI: 10.1002/adfm.201000436
• 发表时间: 2010-09-09
• 期刊: ADVANCED FUNCTIONAL MATERIALS
• 影响因子: 19
• 作者: Chang, Jui-Fen;Gwinner, Michael C.;Sirringhaus, Henning
• 通讯作者: Sirringhaus, Henning

Temperature- and density-dependent channel potentials in high-mobility organic field-effect transistors

• DOI: 10.1103/physrevb.80.115325
• 发表时间: 2009-09
• 期刊: Physical Review B
• 影响因子: 3.7
• 作者: M. Kemerink;T. Hallam;Mi Jung Lee;Ni Zhao;M. Caironi;H. Sirringhaus

Local charge trapping in conjugated polymers resolved by scanning Kelvin probe microscopy.

• DOI: 10.1103/physrevlett.103.256803
• 发表时间: 2009-12
• 期刊: Physical review letters
• 影响因子: 8.6
• 作者: T. Hallam;Mijung Lee;Ni Zhao;I. Nandhakumar;M. Kemerink;M. Heeney;I. McCulloch;H. Sirringhaus