Selective Chemical Vapour Deposition for Production of Thermoelectric Micro-Generators for Energy Harvesting

用于生产能量收集用热电微型发电机的选择性化学气相沉积

• 批准号: ST/P00007X/1
• 负责人: G Reid
• 金额: $ 46.27万
• 依托单位: University of Southampton
• 依托单位国家: 英国
• 项目类别: Research Grant
• 财政年份: 2016
• 资助国家: 英国
• 起止时间: 2016 至 无数据
• 项目状态: 已结题
• 来源: https://gtr.ukri.org/projects?ref=ST%2FP00007X%2F1
• 关键词: Selective; Chemical; Vapour; Deposition; Production

Thermoelectric micro-generators are solid state devices that can provide constant sources of electricity. They have a number of very favourable features, i.e. no mechanical parts that can wear out, require little maintenance, have long lifetimes and produce no emissions. Solid-state thermoelectric devices are based upon one of two phenomena, the Seebeck effect, which can be used for power generation (energy harvesting), and the Peltier effect for electronic cooling or heating. In order to produce a functional thermoelectric device, an n-type doped material is connected electrically in series and thermally in parallel across a temperature differential to a p-type doped material, so that current flows between the two. Bismuth telluride based thermoelectric materials are very well suited for near room temperature applications, including wireless sensing. Through recent research supported by STFC, we have developed a new series of molecular precursor compounds which can be used in chemical vapour deposition to produce high quality thin films of (n-type) bismuth telluride and (p-type) antimony telluride. Unusually, our precursors and CVD-based system allows the materials to be deposited very selectively onto specific areas of lithographically patterned substrates. The focus of this project is to work closely with key stakeholders, including a thermoelectric device company and a specialist precursor manufacturer, to exploit the unique features of our precursors and CVD-based approach so that the production costs for manufacture of thermoelectric micro-generators can be reduced significantly. Since the actual production costs account for the majority of the unit cost per thermoelectric generator, reducing this is a high priority to allow penetration of these micro-generator devices into new and larger markets. Validation and benchmarking of the key thermoelectric properties of our CVD-produced thermoelectric micro-generators is central to the work, and this will also provide the key data necessary to evaluate the prospect of using our CVD-based approach for TE micro-coolers for future applications such as on-chip cooling of microprocessors.

热电微型发电机是固态装置，可以提供恒定的电力来源。它们具有许多非常有利的特点，即没有可能磨损的机械部件，几乎不需要维护，寿命长，不产生排放。固态热电装置是基于两种现象之一，塞贝克效应，可用于发电（能量收集），和珀尔帖效应，用于电子冷却或加热。为了制造功能热电器件，n型掺杂材料与p型掺杂材料电串联连接并且跨越温差热并联连接，使得电流在两者之间流动。碲化铋基热电材料非常适合于近室温应用，包括无线传感。通过STFC最近的研究，我们开发了一系列新的分子前体化合物，可用于化学气相沉积，以生产高质量的（n型）碲化铋和（p型）碲化锑薄膜。不同寻常的是，我们的前体和基于CVD的系统允许材料非常选择性地沉积到光刻图案化衬底的特定区域上。该项目的重点是与关键利益相关者密切合作，包括热电设备公司和专业前驱体制造商，以利用我们前驱体的独特功能和基于CVD的方法，从而显着降低热电微型发电机的生产成本。由于实际生产成本占每个热电发电机的单位成本的大部分，因此降低这一成本是允许这些微型发电机设备渗透到新的和更大的市场的高度优先事项。我们的CVD生产的热电微型发电机的关键热电性能的验证和基准测试是这项工作的核心，这也将提供必要的关键数据，以评估使用我们的CVD为基础的方法TE微冷却器的未来应用，如微处理器的片上冷却的前景。

项目成果

Artificial neural network enabled accurate geometrical design and optimisation of thermoelectric generator

• DOI: 10.1016/j.apenergy.2021.117800
• 发表时间: 2022-01
• 期刊: Applied Energy
• 影响因子: 11.2
• 作者: Yuxiao Zhu;D. Newbrook;Peng Dai;C. H. Groot;R. Huang

Improved thermoelectric performance of Bi2Se3 alloyed Bi2Te3 thin films via low pressure chemical vapour deposition

• DOI: 10.1016/j.jallcom.2020.156523
• 发表时间: 2020-08
• 期刊: Journal of Alloys and Compounds
• 影响因子: 6.2
• 作者: Daniel W. Newbrooka;Stephen P. Richardsb;Victoria K. Greenacreb;A. Hectorb;W. Levasonb;Gillian Reidb-Gillian-Reid

[Ge(TenBu)4] - a single source precursor for the chemical vapour deposition of germanium telluride thin films.

• DOI: 10.1039/c8dt03263g
• 发表时间: 2019-01
• 期刊: Dalton transactions
• 影响因子: 4
• 作者: Samantha L. Hawken;R. Huang;de Groot;A. Hector;M. Jura;W. Levason;G. Reid;Gavin B. G. Stenningc

Mathematical model and optimization of a thin-film thermoelectric generator

• DOI: 10.1088/2515-7655/ab4242
• 发表时间: 2019-11
• 期刊: Journal of Physics: Energy
• 作者: D. Newbrook;R. Huang;Stephen P Richards;Shiva Sharma;G. Reid;A. Hector;C. H. (Kees) de Groot