A new approach for highly accurate optical interferometry measurements in nanotechnology

纳米技术中高精度光学干涉测量的新方法

• 批准号: 1943924
• 金额: --
• 依托单位: CRANFIELD UNIVERSITY
• 依托单位国家: 英国
• 项目类别: Studentship
• 财政年份: 2017
• 资助国家: 英国
• 起止时间: 2017 至 无数据
• 项目状态: 已结题
• 来源: https://gtr.ukri.org/projects?ref=studentship-1943924
• 关键词: new; approach; highly; accurate; optical

The project shall explore the potential of a recently developed interferometry technique for spatially resolved interferometry applied to high-accuracy (sub-nm) optical distance measurements. This new approach enables the use of unconventional and very compact optical setups and therefore has the potential to benefit a wide range of high-accuracy applications in nanoscience and technology. One of the important challenges to be solved in this project is how to improve the calibration of the laser emission wavelength, ideally using an atomic absorption line reference to make the measurements meteorologically traceable. Furthermore, the ultimate performance limits , such as the apparent high linearity of the proposed technique should be investigated and characterised. Additional topics can be the extension of the proposed the wavelength calibration approach to other laser sources, potentiall opening up new avenues in high-resolution spectroscopy experiments and general laser technology.

该项目将探索最近开发的空间分辨干涉测量技术在高精度（亚纳米）光学距离测量中的潜力。这种新方法可以使用非常规且非常紧凑的光学装置，因此有可能使纳米科学和技术领域的各种高精度应用受益。该项目要解决的重要挑战之一是如何改进激光发射波长的校准，最好使用原子吸收线参考，使测量结果在气象上可追溯。此外，应研究和表征最终性能限制，例如所提出技术的明显高线性度。其他主题可以是将所提出的波长校准方法扩展到其他激光源，有可能为高分辨率光谱实验和通用激光技术开辟新途径。

项目成果

Three-dimensional interferometric stage encoder using a single access port

• DOI: 10.1016/j.optlaseng.2020.106342
• 发表时间: 2021-02
• 期刊: Optics and Lasers in Engineering
• 影响因子: 4.6
• 作者: Kieran B. Wiseman;T. Kissinger;R. Tatam

Two-dimensional remote interferometric stage encoder through a single access port using range-resolved interferometry

使用范围分辨干涉测量通过单个访问端口进行二维远程干涉测量台编码器

• DOI: 10.1117/12.2525596
• 发表时间: 2019
• 作者: Wiseman K