Development of coated silicon microneedles for vaccine smart patch

疫苗智能贴片用涂层硅微针的研制

• 批准号: 2597783
• 金额: --
• 依托单位: Swansea University
• 依托单位国家: 英国
• 项目类别: Studentship
• 财政年份: 2021
• 资助国家: 英国
• 起止时间: 2021 至 无数据
• 项目状态: 未结题
• 来源: https://gtr.ukri.org/projects?ref=studentship-2597783
• 关键词: Development; coated; silicon; microneedles; vaccine

Project AimsThis project will develop the silicon etch process technology to scale up the microneedle fabrication process from 100mm diameter wafers to 150mm diameter wafers - enabling more microneedle chips to be produced at lower cost. The process will be optimised using silicon smoothing and improved photolithography processes. The project will incorporate a self-release etch step into the fabrication process, so that microneedles can be easily separated from the wafer into individual devices. The project will also develop new plasma coating techniques to coat the microneedle in thin films which may be water repellent or non-stick, insulating or metallic. This will be achieved using Chemical Vapour Deposition, Molecular Vapour Deposition and electroplating.This will allow development of a range of microneedle products for a variety of health and cosmetic applications. The research engineer will use the facilities at the Centre for Nanohealth and the new £90 million Centre for Integrative Semiconductor Materials (CISM). Additionally, as the semiconductor community in South Wales is expanding rapidly the research engineer will receive training and preparation skills highly appropriate to a career in the semiconductor industry.BackgroundSPTS Technologies, a KLA company, designs, manufactures, sells, and supports etch, PVD, CVD and MDS capital equipment, providing advanced wafer processing technologies and solutions for the semiconductor and microelectronics industry. SPTS are experts in semiconductor film coatings, deposition and etch technology, their revenue generation is from equipment sales and support services supplied to customers in major foundries and IDMs servicing end-market applications including micro-electromechanical systems (MEMS), advanced packaging, LED, high-speed RF device IC's and power semiconductors. SPTS have a growing activity in technology and products related to BioMEMS and have been developing microneedle technology with Swansea University for drug and vaccine delivery applications.SPTS Technologies - a global leader in wafer processing equipment for the semiconductor and related industries - have been working with Swansea University to apply novel deep-etch and deposition plasma process technology to Bio microelectromechanical systems (Bio-MEMS) and healthcare products. http://www.semiconductor-today.com/news_items/2019/aug/asset-200819.shtmlOne of these technologies is hollow silicon microneedles. They are the longest "out of plane", sharpest silicon microneedles in the world and have been demonstrated for insulin delivery and cell delivery.https://www.bbc.co.uk/news/uk-wales-44546252More recently, SPTS microneedles have been used in the development of a smart patch for vaccine delivery and detection of a successful response to the vaccine by the body.https://www.bbc.co.uk/news/uk-wales-55548670This could ultimately be used for vaccination and testing of vaccination efficacy for COVID and other viruses.

项目目标该项目将开发硅蚀刻工艺技术，以将微针制造工艺从100 mm直径的晶片扩大到150 mm直径的晶片，从而以更低的成本生产更多的微针芯片。该过程将使用硅平滑和改进的光刻工艺进行优化。该项目将在制造过程中加入一个自释放蚀刻步骤，这样微针就可以很容易地从晶片上分离成单独的器件。该项目还将开发新的等离子涂层技术，为微针涂上防水或不粘、绝缘或金属的薄膜。这将通过化学气相沉积、分子气相沉积和电镀来实现。这将允许开发用于各种健康和化妆品应用的一系列微针产品。研究工程师将使用纳米健康中心和新的9000万英镑集成半导体材料中心（CISM）的设施。此外，随着南威尔士半导体行业的迅速发展，研究工程师将获得非常适合半导体行业职业生涯的培训和准备技能。背景SPTS Technologies是KLA公司，设计，制造，销售和支持蚀刻，PVD，CVD和MDS资本设备，为半导体和微电子行业提供先进的晶圆加工技术和解决方案。SPTS是半导体薄膜镀膜、沉积和蚀刻技术方面的专家，其收入来源于向主要铸造厂和IDM客户提供的设备销售和支持服务，这些客户服务于终端市场应用，包括微机电系统（MEMS）、先进封装、LED、高速RF器件IC和功率半导体。SPTS在BioMEMS相关技术和产品方面的活动日益增加，并一直与斯旺西大学合作开发用于药物和疫苗输送应用的微针技术。SPTS Technologies是半导体及相关行业晶圆加工设备的全球领导者，一直与斯旺西大学合作，将新型深蚀刻和沉积等离子体工艺技术应用于生物微机电系统（Bio-MEMS）和医疗保健产品。http://www.semiconductor-today.com/news_items/2019/aug/asset-200819.shtmlOne这些技术中的一种是空心硅微针。它们是世界上最长的“平面外”、最锋利的硅微针，并已被证明用于胰岛素递送和细胞delivery.https://www.bbc.co.uk/news/uk-wales-44546252More最近，SPTS微针已用于开发用于疫苗递送的智能贴片，并通过body.https://www.bbc.co.uk/news/uk-wales-55548670This检测对疫苗的成功反应，最终可用于接种疫苗和测试COVID和其他病毒的疫苗接种效力。