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SuperSTEM - the UK aberration-corrected STEM facility

SuperSTEM - 英国像差校正 STEM 设施

基本信息

批准号：
EP/D040205/1
负责人：
Alan Craven
金额：
$ 73.14万
依托单位：
University of Glasgow
依托单位国家：
英国
项目类别：
Research Grant
财政年份：
2006
资助国家：
英国
起止时间：
2006 至无数据
项目状态：
已结题

来源：
https://gtr.ukri.org/projects?ref=EP%2FD040205%2F1
关键词：
SuperSTEM UK aberration corrected STEM

项目摘要

Electron microscopes allow scientists to see and analyse solid materials on the atomic scale. Conventional electron microscopes suffer from aberrations which limit their ability to resolve fine detail. These aberrations can now be corrected, just as defects in human vision can be corrected by glasses. The SuperSTEM project has involved the development and testing of two special aberration-corrected microscopes, the second of which is being installed at the end of 2005. These microscopes enable scientists to determine the nature and position of specific atoms and small groups of atoms in materials such as semiconductor devices, catalysts and environmental particulates. This proposal is to enable the two SuperSTEM microscopes to produce experimental results for applications a range of fields of scientific and technological importance and to give UK researchers and students world-leading expertise in analytical techniques.Among the things we propose to do are:* Develop smart ways of collecting information, so that we can look at a single column of atoms for a very long time, even if it is moving slightly.* Develop new ways of simulating what atoms and crystal defects should look like in an aberration-corrected STEM, so that we can interpret what we see by comparison with predicted images.* Seek collaborators to develop the understanding of the energy loss process as the probe becomes smaller than the atom spacing * Develop a new type of x-ray detector so that we can analyse at the atomic scale using either or both x-rays and energy loss spectrometers, whichever is most appropriate.* Determine where dopants atoms are in small semiconductor device structures which rely on only a few atoms to operate.* Analyse the atoms which are most significant to the operation or effect of catalysts, strong materials, pollutant particles, quantum dots, magnetic nanoparticles and iron in the liver.* Train the next generation of scientists who will be able to exploit this excellent technology for the benefit of mankind.

电子显微镜使科学家能够在原子尺度上观察和分析固体材料。传统的电子显微镜受到像差的影响，这限制了它们分辨细节的能力。这些像差现在可以被校正，就像人类视力的缺陷可以通过眼镜来校正一样。SuperSTEM项目涉及两个特殊的像差校正显微镜的开发和测试，其中第二个将于2005年底安装。这些显微镜使科学家能够确定材料中特定原子和小原子团的性质和位置，如半导体器件，催化剂和环境颗粒。该计划旨在使这两台SuperSTEM显微镜能够为一系列重要的科学和技术领域的应用提供实验结果，并为英国研究人员和学生提供世界领先的分析技术专业知识。我们建议做的事情包括：* 开发收集信息的智能方法，以便我们可以长时间观察一列原子，即使它轻微移动。*开发新的方法来模拟原子和晶体缺陷在像差校正STEM中应该是什么样子，这样我们就可以通过与预测图像的比较来解释我们所看到的。寻求合作者，以发展对探针变得小于原子间距时的能量损失过程的理解 * 开发一种新型的X射线探测器，以便我们可以在原子尺度上使用X射线和能量损失光谱仪中的一种或两种进行分析。确定掺杂剂原子在小型半导体器件结构中的位置，这些结构仅依赖于几个原子来操作。分析对肝脏中催化剂、强物质、污染物颗粒、量子点、磁性纳米颗粒和铁的操作或效果最重要的原子。*培养下一代科学家，使他们能够利用这项优秀的技术造福人类。

项目成果

期刊论文数量（10）

专著数量（0）

科研奖励数量（0）

会议论文数量（0）

专利数量（0）

Nanoanalysis of a sub-nanometre reaction layer in a metal inserted high-k gate stack

金属插入高 k 栅极堆叠中亚纳米反应层的纳米分析

DOI：
10.1016/j.mee.2011.03.084
发表时间：
2011
期刊：
Microelectronic Engineering
影响因子：
2.3
作者：
Craven A
通讯作者：
Craven A

Atomic-scale surface roughness of rutile and implications for organic molecule adsorption.

DOI：
10.1021/la4005328
发表时间：
2013-05
期刊：
Langmuir : the ACS journal of surfaces and colloids
影响因子：
0
作者：
K. Livi;B. Schaffer;D. Azzolini;C. Seabourne;T. Hardcastle;A. Scott;R. Hazen;J. Erlebacher;R. Brydson;D. Sverjensky
通讯作者：
K. Livi;B. Schaffer;D. Azzolini;C. Seabourne;T. Hardcastle;A. Scott;R. Hazen;J. Erlebacher;R. Brydson;D. Sverjensky

A new analytical method for characterising the bonding environment at rough interfaces in high-k gate stacks using electron energy loss spectroscopy.

一种使用电子能量损失光谱表征高 k 栅堆叠中粗糙界面处键合环境的新分析方法。