A chip device for on-line assessment in nano-scale surface manufacture

一种用于纳米级表面制造在线评估的芯片装置

• 批准号: EP/E03733X/1
• 负责人: Xiangqian Jiang
• 金额: $ 58.15万
• 依托单位: University of Huddersfield
• 依托单位国家: 英国
• 项目类别: Research Grant
• 财政年份: 2007
• 资助国家: 英国
• 起止时间: 2007 至 无数据
• 项目状态: 已结题
• 来源: https://gtr.ukri.org/projects?ref=EP%2FE03733X%2F1
• 关键词: chip; device; line; assessment; nano

In developed economies the manufacture of high added value critical components is rapidly shifting to the design and fabrication of micro and nano structured and freeform surfaces. The market for components possessing these surfaces is huge (the annual turnover is over 75 billion in the UK) and growing by 25% per year (1996-2005) with great investment in the UK, USA, Germany, France and East Asia. The rapidly increasing use of nano scale and ultra-precision structured surfaces is wide ranging and covers optics, hard disks, medical devices and the micro moulding industries that all critically rely on ultra precision surfaces. The scale of the products does not limit the need for the surface precision. The James Webb Space Telescope project for instance requires 1.3 metre size complex freeform surface segmented telescope mirrors with less than 10nm form deviation.Ultra-precision multi-axis machining and micro-fabrication technologies are enabling technologies that allow the designed surfaces to be fabricated with the required sub-micrometer form accuracy and nanometric surface topography. There is however a fundamental limiting factor to manufacture of such surfaces, namely the ability to measure product with high level accuracy, and also on-line.The proposed project attempts to create a novel in/on line surface measurement system, which integrates the essential optical components of an interferometer, such as, light source, optical components, a detector, into a solid state chip device. The key and novel aspect of the research, within the project, is to study and develop techniques to fabricate and integrate optical elements onto the same motherboard chip. The feasibility of building a robust and miniature surface measurement system and applying it to on-line micro and nanoscale surface measurement will then be explored. The proposed project will involve an interdisciplinary team of researchers and industrialists: the Surface Metrology Group at the University of Huddersfield (UoH), the Centre for Integrated Photonics (CIP), instrument manufacturer Taylor Hobson Limited (TH) and Ultra-Precision Surfaces at the OpTIC Technium (OpTIC) in North Wales. The group's combined activities include 'state of the art' capabilities in surface metrology, integrated optics, metrology instruments and ultra-precision surface manufacturing. The aim is to demonstrate a unique and novel technique for micro, nano scale manufacture that represents a step change in the field of surface metrology, integrated optics, nanotechnology, and instrumentation. The inclusion of the partners demonstrates the supply chain required in such systems / the research group (Huddersfield) developing the fundamental measurement system approach, a technology translator and device manufacturer (CIP), a measurement tool manufacturer (Taylor-Hobson) and an end user (OpTIC). Should the project succeed as planned, then there is an excellent chance of downstreaming this approach into commercialisation.CIP is a subcontractor on this project responsible for the delivery of the advanced optoelectronic devices used in the project and the final optoelectronic hybrid chip. CIP - a not for profit organisation - has a track record of working with university groups in this way for the development of advanced components for research. Previous examples being the EPSRC funded projects PRINCE and PORTRAIT where CIP were (and are) responsible for the development of leading edge research devices for telecommunications, terahertz imaging, biophotonics and sensing applications within these projects. The centre provides an open acess R&D facility for industry and universities. The EPSRC have agreed to support the access to CIP for academics by funding full economic costs on individual research grants.

在发达经济体中，高附加值关键部件的制造正在迅速转向微纳米结构和自由曲面的设计和制造。具有这些表面的组件的市场是巨大的（英国的年营业额超过750亿英镑），并且每年增长25%（1996-2005年），在英国，美国，德国，法国和东亚进行了大量投资。纳米级和超精密结构化表面的使用范围非常广泛，涵盖了光学、硬盘、医疗设备和微型成型行业，这些行业都严重依赖超精密表面。产品的规模并不限制对表面精度的要求。例如，詹姆斯·韦伯太空望远镜项目需要1.3米尺寸的复杂自由曲面分段望远镜反射镜，其形状偏差小于10纳米，超精密多轴加工和微加工技术使设计的表面能够以所需的亚微米形状精度和纳米表面形貌制造。然而，有一个基本的限制因素，制造这样的表面，即能够测量产品的高水平的精度，也on-line.拟议的项目试图创建一个新的在线/在线表面测量系统，它集成了必要的光学元件的干涉仪，如光源，光学元件，检测器，到一个固态芯片设备。该研究的关键和新颖的方面，在该项目中，是研究和开发技术，制造和集成光学元件到同一主板芯片。本论文将探讨建立一个稳固且微型化的表面量测系统，并将其应用于线上微奈米表面量测的可行性。拟议的项目将涉及一个跨学科的研究人员和工业家团队：表面计量组在哈德斯菲尔德（UoH），中心集成光子学（CIP），仪器制造商泰勒霍布森有限公司（TH）和超精密表面在光学技术（光学）在北威尔士大学。该集团的综合业务包括在表面计量、集成光学、计量仪器和超精密表面制造方面的“最先进”能力。其目的是展示一种独特而新颖的微、纳米尺度制造技术，代表了表面计量、集成光学、纳米技术和仪器仪表领域的一步变化。合作伙伴的加入表明了这种系统所需的供应链/研究小组（哈德斯菲尔德）开发基本的测量系统方法，技术翻译和设备制造商（CIP），测量工具制造商（泰勒-霍布森）和最终用户（OptIC）。如果该项目按计划成功，那么将有很好的机会将这种方法下游商业化。CIP是该项目的分包商，负责交付项目中使用的先进光电器件和最终的光电混合芯片。CIP --一个非营利组织--有着以这种方式与大学团体合作开发先进研究组件的记录。以前的例子是EPSRC资助的项目PRINCE和PORTRAIT，CIP负责开发这些项目中用于电信，太赫兹成像，生物光子学和传感应用的前沿研究设备。该中心为工业和大学提供了一个开放的研发设施。EPSRC已同意通过资助个人研究赠款的全部经济成本来支持学术人员获得CIP。

项目成果

Wavelength scanning interferometer for structured surfaces

用于结构化表面的波长扫描干涉仪

• 发表时间: 2010
• 作者: X Jiang

Vibration compensating beam scanning interferometer for surface measurement.

• DOI: 10.1364/ao.47.000888
• 发表时间: 2008-03
• 期刊: Applied optics
• 影响因子: 1.9
• 作者: H. Martin;Kaiwei Wang;X. Jiang

Phase feedback fibre interferometer for surface profiling

用于表面轮廓分析的相位反馈光纤干涉仪

• DOI: 10.1504/ijptech.2011.039462
• 发表时间: 2011
• 期刊: International Journal of Precision Technology
• 作者: Jiang X

A hybrid photonics based sensor for surface measurement

用于表面测量的基于混合光子学的传感器

• DOI: 10.1016/j.cirp.2014.03.046
• 发表时间: 2014
• 期刊: CIRP Annals
• 作者: Martin H