Next Generation Metrology Driven by Nanophotonics

纳米光子学驱动的下一代计量

• 批准号: EP/T02643X/1
• 负责人: Xiangqian Jiang
• 金额: $ 705.87万
• 依托单位: University of Huddersfield
• 依托单位国家: 英国
• 项目类别: Research Grant
• 财政年份: 2021
• 资助国家: 英国
• 起止时间: 2021 至 无数据
• 项目状态: 未结题
• 来源: https://gtr.ukri.org/projects?ref=EP%2FT02643X%2F1
• 关键词: Next; Generation; Metrology; Driven; Nanophotonics

Optical metrology plays a vital role in an astonishing array of important research areas and applications, from basic science discovery to material processing, medicine, healthcare, energy, manufacturing and engineering. Optical metrology instruments are normally large, heavy structures that require a well-stabilised environment to maintain accuracy, stability and functionality. These physical and functional features prevent optical metrology from moving into future smart and autonomous applications across many sectors. The proposed programme aims to challenge fundamental barriers to the use of optical measurement techniques in highly integrated, smart and autonomous 'Industry 4.0' metrology applications and emerging nanotechnologies, by establishing a unique, world-leading research collaboration in the UK that brings together advanced metrology and nanotechnology. It will translate the latest advances in nanophotonics, plasmonics and metamaterials research, in which the UK has played an internationally-leading role, into metrological applications. This will have a transformational impact on optical metrology by enabling cheaper, smarter and much more compact solutions. Research will be channelled through three complementary streams: 1. Nanophotonics-enabled components for metrology. This strand of the programme will draw on the wealth of recent fundamental developments in nanophotonics, for example, the fact that surfaces patterned with subwavelength-sized features can offer exquisite control over the wavefront of propagating light. Replacing one (or several) bulky element(s) with a single surface that carries out the same (combined) function offers hugely significant savings in size and weight, complexity and robustness (e.g. against misalignment), and opportunity to develop new measurement functionalities and instrumental configurations that are not otherwise possible. 2. Novel metrology concepts for nanotechnology. We will develop two ground-breaking ideas for metrological technologies: (1) The "optical ruler", which allows for non-contact displacement measurements with potentially sub-nm resolution using a sensor that could ultimately be manufactured on the tip of an optical fibre; (2) An approach to dynamic "nano-motion imaging" based upon the scanning electron microscopy (SEM) platform, to spatially map high-frequency nano- to picometre amplitude movement. 3. Novel metrology tools for manufacturing and nanotechnology. Using the nanophotonic components and concepts described above, we will develop novel metrology tools and measurement techniques to perform in real-world, as opposed to laboratory, conditions. Target applications will include, for example, surface/geometric metrologies compatible with manufacturing tools such as diamond turning machines and multi-axis (sub-) nanometric displacement encoding for translation stages.This programme will bring together the expertise of world-leading research groups in metrology and nanophotonics, with key industrial project partners including Renishaw and Taylor Hobson. Together, we aim to address long-standing challenges for optical metrology and to develop new, disruptive metrological technologies. These advances will be vital to support the high-value manufacturing sector in the UK. The impact of this work, however, will be felt across a far broader range of disciplines, as size and weight are significant issues in, for example, instrumentation for space science, optical instrumentation for surgical applications, and robotic arm-mounted instruments.

从基础科学发现到材料加工、医学、医疗保健、能源、制造和工程，光学计量在众多重要研究领域和应用中发挥着至关重要的作用。光学计量仪器通常是大型、重型结构，需要良好稳定的环境来保持精度、稳定性和功能性。这些物理和功能特征阻止了光学计量在许多领域进入未来的智能和自主应用。该计划旨在通过在英国建立一个独特的、世界领先的研究合作，将先进的计量学和纳米技术结合起来，挑战在高度集成、智能和自主的“工业4.0”计量应用和新兴纳米技术中使用光学测量技术的根本障碍。它将把英国在纳米光子学、等离子体和超材料研究中发挥国际领先作用的最新进展转化为可持续应用。这将通过实现更便宜，更智能和更紧凑的解决方案对光学计量产生变革性影响。研究将通过三个互补的流进行：1。用于计量的纳米光子学元件。该计划的这一链将利用纳米光子学最近的基本发展的财富，例如，具有亚波长尺寸特征的表面图案可以提供对传播光的波前的精细控制。用执行相同（组合）功能的单个表面替换一个（或多个）庞大的元件提供了在尺寸和重量、复杂性和鲁棒性（例如，针对未对准）方面的巨大显著节省，以及开发新的测量功能和仪器配置的机会，这在其他情况下是不可能的。 2.纳米技术的新计量概念。我们将为MEMS技术开发两个突破性的想法：（1）“光学标尺”，它允许使用最终可以在光纤尖端制造的传感器进行具有潜在亚纳米分辨率的非接触式位移测量;（2）基于扫描电子显微镜（SEM）平台的动态“纳米运动成像”方法，以空间映射高频纳米至皮米幅度运动。3.用于制造和纳米技术的新型计量工具。使用上述纳米光子组件和概念，我们将开发新的计量工具和测量技术，以在现实世界中执行，而不是实验室条件。目标应用将包括与金刚石车床等制造工具兼容的表面/几何计量和用于平移台的多轴（亚）纳米位移编码。该计划将汇集世界领先的计量和纳米光子学研究小组的专业知识，以及雷尼绍和泰勒霍布森等主要工业项目合作伙伴。我们的目标是共同应对光学计量长期面临的挑战，并开发新的颠覆性测量技术。这些进步对于支持英国的高价值制造业至关重要。然而，这项工作的影响将在更广泛的学科范围内感受到，因为尺寸和重量是空间科学仪器，手术应用光学仪器和机器人手臂安装仪器等领域的重要问题。

项目成果

Deep-Learning-Assisted Focused Ion Beam Nanofabrication.

深度学习辅助聚焦的离子束纳米化。

• DOI: 10.1021/acs.nanolett.1c04604
• 发表时间: 2022-04-13
• 期刊: Nano letters
• 影响因子: 10.8
• 作者: Buchnev O;Grant-Jacob JA;Eason RW;Zheludev NI;Mills B;MacDonald KF
• 通讯作者: MacDonald KF

Towards metasurfaces for metrological applications

迈向计量应用的超表面

• 发表时间: 2022
• 作者: Henning A

Coherently switching the focusing characteristics of all-dielectric metalenses.

连贯地切换全电介质超镜头的聚焦特性。

• DOI: 10.1364/oe.461264
• 发表时间: 2022
• 期刊: Optics express
• 影响因子: 3.8
• 作者: He F

Counting and mapping of subwavelength nanoparticles from a single shot scattering pattern

• DOI: 10.1515/nanoph-2022-0612
• 发表时间: 2023-01
• 期刊: Nanophotonics
• 影响因子: 7.5
• 作者: E. A. Chan;C. Rendón-Barraza;Benquan Wang;T. Pu;J. Ou;Hongxin Wei;G. Adamo;Bo An;N. Zheludev

An ultra-compact metasurface-based chromatic confocal sensor

• DOI: 10.1016/j.cirp.2023.04.002
• 发表时间: 2023-04
• 期刊: CIRP Annals
• 作者: J. Chan;D. Tang;J. Williamson;H. Martin;A. Henning;X. Jiang