Commercially Viable Wide-Band Ultrasound Arrays Based on CMUT Technology

描述（由申请人提供）：拟议计划的目标是解决几个技术可行性问题（在第一阶段），然后证明（在随后的第二阶段）将Sonetics突破性的CMUT-in-CMOS超声换能器技术纳入适合商业应用的新型高性能2D超声阵列。第一阶段的具体目标将研究2D阵列元件的带宽改进，片上读出电路的缩放和增强，以及与器件膜密封层相关的介电充电效应的减少。这一阶段将以64单元2D阵列原型的制造和表征而告终，该原型将用于评估更大规模阵列的成像潜力。第二阶段将展示适合实时3D成像的原型扫描头（包括128 x128元件CMUT阵列）的全面实施，长期目标是将该技术（以及其他基于CMUT in CMOS的产品）商业化，用于超声设备市场，预计到2010年全球将达到37.5亿美元。该市场的学术部分将受益于完全填充的2D超声阵列的实际实现，这将提高疾病诊断的3D成像的质量和速度。同样，基于CMUT的扫描头在降低许多最先进的超声系统的最大成本元素的同时，同时表现出改进的成像能力，这将为研究人员和学生提供更多的机会来进行活体系统的实时体内研究-从成本、可用性和便利性的角度来看，3D超声具有独特的优势（例如，与MRI、PET或CT相比，所有这些都需要昂贵的专用设施和技术人员）。临床市场也将获得类似的收益，因为3D超声提供了安全，方便，实时的成像技术，能够改善分类和更好的患者结果，降低成像成本，减少人员需求，所有这些都将为美国医疗保健行业提供服务，因为它寻求控制飞涨的成本。 公共卫生相关性：Sonetics新型超声换能器技术的成功开发对公共卫生的潜在好处包括：提高用于疾病诊断的高质量3D医学成像的可用性和可负担性;随着低成本3D超声进入课堂，改善了医疗培训;降低了整个社会的医疗保健成本，因为更好的超声改善了临床分诊和患者预后。此外，超声是唯一有潜力成为一种方便，安全，实时成像工具的技术，可用于预算有限的设施，如低收入诊所。

DESCRIPTION (provided by applicant): The goal of the proposed program is to address several technical feasibility questions (in Phase I), and then demonstrate (in a subsequent Phase II) incorporation of Sonetics' groundbreaking CMUT-in-CMOS ultrasound transducer technology into a novel, high-performance 2D ultrasound array suitable for commercial applications. Phase I specific aims will investigate bandwidth improvement for 2D array elements, scaling and enhancement of on-chip readout circuits, and reduction of dielectric charging effects related to device membrane sealing layers. This phase will culminate with the fabrication and characterization of a 64-element 2D array prototype, which will be used to evaluate the imaging potential of a larger scale array. Full implementation into a prototype scanhead (including a 128x128 element CMUT array) suitable for real-time 3D imaging would be demonstrated in Phase II, with the long-term goal of commercializing the technology (as well as other CMUT-in-CMOS-based products) for the ultrasound equipment market, forecast to be $3.75B globally by 2010. The academic segment of this market would benefit from the practical realization of fully-populated 2D ultrasound arrays, which will improve the quality and speed of 3D imaging for disease diagnosis. As well, the potential of CMUT-based scanheads to reduce the largest cost element of many state-of-the-art ultrasound systems, while simultaneously exhibiting improved imaging capability, will provide increased opportunity for researchers and students to undertake real-time, in vivo studies of living systems-something 3D ultrasound is uniquely positioned to do from a cost, availability, and convenience perspective (vs. MRI, PET, or CT, for example, all of which require expensive, dedicated facilities and technicians). The clinical market stands to gain similarly, as 3D ultrasound provides safe, convenient, real-time imaging technology-enabling improved triage and better patient outcomes, lower-cost imaging, and reduced staffing needs, all of which will serve the U.S. healthcare industry well as it seeks to control skyrocketing costs. PUBLIC HEALTH RELEVANCE: Potential benefits to public health from the successful development of Sonetics' novel ultrasound transducer technology include: improved availability and affordability of high-quality 3D medical imaging for disease diagnosis; improved medical training as low-cost 3D ultrasound enters the classroom; and lowered health-care costs for society as a whole, as better ultrasound improves clinical triage and patient outcomes. Furthermore, ultrasound is the only technology with the potential to become a convenient, safe, real-time imaging tool for use in limited-budget facilities such as lowincome health clinics.