Microscope for RF probe station

无线和互联网技术的爆炸式增长促进了信息数据的传输，并对能够在毫米波频段工作的新型天线产生了越来越大的需求。遥感天线、车辆防撞系统和智能天线的开发也正在进行重大研究。由于普通微波衬底和元件在这些频率下具有高损耗，因此制造这些高频射频系统是困难和昂贵的。微加工技术提供了许多解决方案，简化了高频系统的制造，同时减小了它们的尺寸、重量和成本。申请者的一个研究领域将包括高频射频应用的MEM技术。重点将放在超低电压MEM开关、有源和/或智能表面上，当电磁波照射时，它们的特性可以在操作过程中发生变化，从反射变为吸收或透明。这种自适应表面有无限的应用，在这个项目中，我们将强调微波和毫米波频段。

The explosive growth of wireless and Internet technologies have facilitated the transmission of information data, and created an increasing demand for new family of antennas, capable of operating in the millimeter wave band. Significant research is also underway to develop remote sensing antennas, vehicular collision avoidance systems, and smart antennas. With common microwave substrates and components having high loss at these frequencies, it is difficult and expensive to fabricate these high frequency RF systems. Microfabrication technologies offer many solutions that simplify the fabrication of high frequency systems, as well as reduce their size, weight, and cost. One area of research of the applicants will include MEM technologies for high frequency RF applications. Focus will be on ultra-low voltage MEM switches, and active and/or smart surfaces, where their properties can be changed during operation, from being reflective to becoming absorptive or transparent, when illuminated by a spectrum of electromagnetic wave. There are unlimited applications for such adaptive surfaces, and in this project we will emphasize the microwave and millimeter wave bands.