Development of a MEMS based proximity voltage sensor with no voltage reference

本项目将致力于开发一种基于MEMS的配电电压传感器 网格，它将在由SiliconPro Inc.开发的SmartBee微传感器网络中实现。这个 SmartBee网络由夹在导线周围的传感器组成，并连续测量 测量电压和电流，并通过无线连接将这些测量结果传送到服务器。首字母 该传感器将在高压输电线路中得到应用。每个传感器节点将由 一种能量收集器，它从流动在地球上的电流产生的磁场中获取能量 列车长。 对高精度、低成本、节能和紧凑的电压传感器的需求是 在MEMS技术中实现了电压传感器。我们将作出两项主要努力。第一，大力发展 这是一种采用MEMS技术的电压传感器，可以集成到SiliconPro的SmartBee微传感器系统中。 第二，研究传感器系统的最佳位置，以获得高测量精度。微机械系统 将开发的电压传感器将是独特的设计，为电网基础设施监控提供潜力， 以及用于在带电线路情况下确保工人安全的传感器。其小巧的体积和较低的功率要求提供了 需要电压或电荷监测的许多其他行业的机会。

This project will is focused on the development of a MEMS based voltage sensor for the electric distribution grid, which will be implemented in the SmartBee micro-sensor network developed by SiliconPro Inc.. The SmartBee network is formed from sensors that are clamped around the conductor and continuously measure the voltage and current, and will communicate these measurements to a server via wireless connection. The initial application of the sensor will be in high voltage electric lines. Each sensor node is to be powered from an energy harvester that is harvesting the energy from the magnetic field generated by the current flowing in the conductor. The need for high precision, low cost, energy efficient and compact voltage sensor are the main drivers for implementing the voltage sensor in MEMS technology. Two main efforts will be undertaken. First, to develop a voltage sensor in MEMS technology that can be integrated in SiliconPro's SmartBee micro-sensor system. Second, to investigate optimum placement of the sensor system for high measurement accuracy. The MEMS voltage sensors to be developed will be unique designs that offer potential for grid infrastructure monitoring, and sensors for worker safety in live line situations. Their small size and lower power requirements, offer opportunities in many other industries requiring voltage or electric charge monitoring.