Photochemical Strategies to Extend the Lithographic Boundaries

扩展光刻边界的光化学策略

• 批准号: 380904-2009
• 负责人: Scaiano, Juan(Tito)
• 金额: $ 9.5万
• 依托单位: University of Ottawa
• 依托单位国家: 加拿大
• 项目类别: Collaborative Research and Development Grants
• 财政年份: 2009
• 资助国家: 加拿大
• 起止时间: 2009-01-01 至 2010-12-31
• 项目状态: 已结题
• 来源: https://www.nserc-crsng.gc.ca/ase-oro/Details-Detailles_eng.asp?id=438541
• 关键词: Photochemical; Strategies; Extend; Lithographic; Boundaries

Two decades ago we pioneered the study of sequential two-photon processes, described as the photochemistry of reaction intermediates. We reviewed the topic in 1988. At the time we frequently talked about two-laser two-color photochemistry, since the laser used to make an intermediate was usually of a different wavelength than that used to irradiate it, frequently leading to products that could not be obtained with a single laser or with a lamp. We usually regarded the -sometimes unavoidable- occurrence of multiphoton processes taking place within a single high-energy laser pulse as a problem.

二十年前，我们率先研究了连续的双光子过程，称为反应中间体的光化学。我们在1988年审查了这个问题。当时我们经常谈论双激光双色光化学，因为用于制造中间体的激光通常与用于照射它的激光具有不同的波长，经常导致无法用单一激光或灯获得的产物。我们通常把在单个高能激光脉冲中发生的多光子过程（有时是不可避免的）视为一个问题。