Facility for characterisation of MEMS, NEMS, and thin films under controlled conditions

在受控条件下表征 MEMS、NEMS 和薄膜的设施

• 批准号: 391228-2010
• 负责人: Bahreyni, Behraad
• 金额: $ 10.93万
• 依托单位: Simon Fraser University
• 依托单位国家: 加拿大
• 项目类别: Research Tools and Instruments - Category 1 (<$150,000)
• 财政年份: 2010
• 资助国家: 加拿大
• 起止时间: 2010-01-01 至 2011-12-31
• 项目状态: 已结题
• 来源: https://www.nserc-crsng.gc.ca/ase-oro/Details-Detailles_eng.asp?id=464721
• 关键词: Facility; characterisation; MEMS; NEMS; thin

The goal of this proposal is to obtain funding to acquire a vacuum probe station and a network/spectrum analyser in order to establish a facility for characterisation of micro- and nano-transducers and materials at Simon Fraser University. This facility will immediately serve at least ten research teams from four departments at SFU. The requested vacuum probe station and the network/spectrum analyser will be used jointly for the majority of the intended research. At a reasonable cost, this facility provides the means for experimental research on characterisation of new devices and materials, verification of the theories, and insight into the fundamentals of operations of micro- and nano-devices.

这项提议的目标是获得资金，以购置一个真空探测站和一个网络/频谱分析仪，以便在西蒙·弗雷泽大学建立一个微纳换能器和材料的鉴定设施。该设施将立即为来自SFU四个部门的至少十个研究小组提供服务。所要求的真空探测站和网络/频谱分析仪将共同用于大部分预定研究。以合理的成本，该设备为实验研究新器件和材料的特性、验证理论和洞察微纳器件的基本操作原理提供了手段。