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Facility for characterisation of MEMS, NEMS, and thin films under controlled conditions

Facility for characterisation of MEMS, NEMS, and thin films under controlled conditions
在受控条件下表征 MEMS、NEMS 和薄膜的设施
批准号：
391228-2010
负责人：
Bahreyni, Behraad
金额：
$10.93万
依托单位：
Simon Fraser University
依托单位国家：
加拿大
项目类别：
Research Tools and Instruments - Category 1 (<$150,000)
财政年份：
2010
资助国家：
加拿大
项目状态：
已结题
起止时间：
2010-01-01 至 2011-12-31
来源：
https://www.nserc-crsng.gc.ca/ase-oro/Details-Detailles_eng.asp?id=464721
关键词：
FacilitycharacterisationMEMSNEMSthin

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中文摘要
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英文摘要
The goal of this proposal is to obtain funding to acquire a vacuum probe station and a network/spectrum analyser in order to establish a facility for characterisation of micro- and nano-transducers and materials at Simon Fraser University. This facility will immediately serve at least ten research teams from four departments at SFU. The requested vacuum probe station and the network/spectrum analyser will be used jointly for the majority of the intended research. At a reasonable cost, this facility provides the means for experimental research on characterisation of new devices and materials, verification of the theories, and insight into the fundamentals of operations of micro- and nano-devices.
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