Development of Ultra Low-Noise Wideband Accelerometers

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Over the past four years, researchers from SFU have developed micromachined accelerometers with an unprecedented combination of performance metrics, including sub-µg resolution, bandwidths of up to 10kHz, and dynamic ranges of better than 120dB. These devices were developed to replace hydrophones in sonar systems in collaboration with our industrial partner, Ultra Electronics Maritime Systems. The goal of the initial work was to deliver prototypes that met the desired performance levels within three years that could be entirely manufactured in Canada as the intended application was in defense market. Over the course of this effort, we developed novel device designs, new microfabrication processes, a suitable packaging process, low-noise interface electronics, and in-package pressure monitoring solutions. We further developed techniques for measurement of noise and full characterization of the fabricated devices. In summer 2016, we shipped our packaged devices to UEMS as the last phase of original research project.