Ion milling delayering
Ion milling delayering
批准号:
411410-2010
负责人:
Charlebois, Serge
金额:
$1.82万
依托单位:
依托单位国家:
加拿大
项目类别:
Engage Grants Program
财政年份:
2010
资助国家:
加拿大
项目状态:
已结题
起止时间:
2010-01-01 至 2011-12-31
关键词:
中文摘要
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英文摘要
Semiconductor chip delayering is done by Chipworks to establish technical evidence of patent infringement in licensing and legal cases centred on circuit design. Chipworks is an Ottawa based Canadian company which is the recognised leader in this field. Methods traditionally used remove layer by layer of materials on the chip (delayering), such as chemical-mechanical polishing or reactive ion etching, are greatly challenged by the always reducing sizes and the greater material diversity encountered in new technologies.
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依托单位:
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批准号:293219-2009
-
项目类别:Discovery Grants Program - Individual
-
资助金额:$1.89万
-
财政年份:2010
-
负责人:Charlebois, Serge
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依托单位:
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资助金额:$1.89万
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-
负责人:Charlebois, Serge
-
依托单位:
海外基金