Electrical Characterization Facility

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The aim of this application is to establish a state-of-the-art electrical characterization facility. The proposed facility will be capable of measuring the primary electrical properties of thin-film, bulk, and nanostructed materials (resistivity, carrier mobility, and carrier concentration) over temperatures ranging from liquid nitrogen temperatures (under -200 degree C) to over 200 degree C. This open-access facility will augment existing fabrication and characterization tools in the Emerging Communications Technology Institute (ECTI). The first of its kind in Canada, ECTI is an inter-disciplinary, inter-faculty open research institute based at the University of Toronto. ECTI operates two state-of-the-art cleanrooms which provides users with access to thin-film deposition, reactive-ion etching, photolithography, spectral ellipsometry, and optical characterization tools.