Infra-red Fourier vacuum spectrometer for solar cell and thin film research

用于太阳能电池和薄膜研究的红外傅立叶真空光谱仪

• 批准号: 423220-2012
• 负责人: Cadien, Kenneth
• 金额: $ 8.52万
• 依托单位: University of Alberta
• 依托单位国家: 加拿大
• 项目类别: Research Tools and Instruments - Category 1 (<$150,000)
• 财政年份: 2011
• 资助国家: 加拿大
• 起止时间: 2011-01-01 至 2012-12-31
• 项目状态: 已结题
• 来源: https://www.nserc-crsng.gc.ca/ase-oro/Details-Detailles_eng.asp?id=495903
• 关键词: Infra; red; Fourier; vacuum; spectrometer

Fourier transform infrared spectroscopy is a powerful measurement technique that is widely used in many research fields. The requested instrument is optimized for solar cell and thin film research. This requires a vacuum spectrometer to permit grazing incidence investigation of shallow dopants in the silicon solar cells as well as the spectroscopy of nm thick deposited ALD films, and the study on the surface residues on the surface of films post CMP. All optics are gold coated for highest optical throughput. The standard spectral range covers 8,000 to 350 cm-1. Range extension packages are available to extend the measurement region from the very far- to the near-IR as well as the visible and ultraviolet regions (28,000-10 cm-1). Standard resolution is 0.4 cm-1 with an option for 0.16 cm-1

傅里叶变换红外光谱是一种功能强大的测量技术，广泛应用于许多研究领域。所要求的仪器是优化的太阳能电池和薄膜的研究。这需要真空光谱仪来允许硅太阳能电池中的浅掺杂剂的掠入射调查以及nm厚沉积ALD膜的光谱学，以及对CMP后膜表面上的表面残留物的研究。 所有的光学元件都镀有黄金，以实现最高的光学吞吐量。标准光谱范围为8，000至350 cm-1。范围扩展包可用于将测量区域从极远红外扩展到近红外以及可见光和紫外区域（28，000 -10 cm-1）。标准分辨率为0.4 cm-1，可选择0.16 cm-1