Internal friction in thin films: application to micro- and nanomechanical resonators

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Micro- and nanoelectromechanical systems (MEMS/NEMS) are a family of miniaturized devices that are being designed and developed for a wide array of applications that range from information and communication technologies to medical diagnostics and therapeutics. These technologies have the potential to make a revolutionary impact on our society, economy, and quality-of-life. However, many formidable scientific and engineering challenges must be solved before this potential can be fully realized in practice. In this context, the overarching goal of my research program is to conduct fundamental materials research that has immediate and direct implications for the design of future generations of MEMS/NEMS with enhanced functionality, improved performance, and greater reliability.