Internal friction in thin films: application to micro- and nanomechanical resonators

薄膜内摩擦：在微米和纳米机械谐振器中的应用

• 批准号: 311802-2009
• 负责人: Vengallatore, Srikar
• 金额: $ 2.91万
• 依托单位: McGill University
• 依托单位国家: 加拿大
• 项目类别: Discovery Grants Program - Individual
• 财政年份: 2011
• 资助国家: 加拿大
• 起止时间: 2011-01-01 至 2012-12-31
• 项目状态: 已结题
• 来源: https://www.nserc-crsng.gc.ca/ase-oro/Details-Detailles_eng.asp?id=480995
• 关键词: Internal; friction; thin; films; application

Micro- and nanoelectromechanical systems (MEMS/NEMS) are a family of miniaturized devices that are being designed and developed for a wide array of applications that range from information and communication technologies to medical diagnostics and therapeutics. These technologies have the potential to make a revolutionary impact on our society, economy, and quality-of-life. However, many formidable scientific and engineering challenges must be solved before this potential can be fully realized in practice. In this context, the overarching goal of my research program is to conduct fundamental materials research that has immediate and direct implications for the design of future generations of MEMS/NEMS with enhanced functionality, improved performance, and greater reliability.

微纳机电系统（MEMS/NEMS）是一系列小型化设备，正在为从信息和通信技术到医疗诊断和治疗的广泛应用而设计和开发。这些技术有可能对我们的社会、经济和生活质量产生革命性的影响。然而，在实践中充分实现这一潜力之前，必须解决许多艰巨的科学和工程挑战。在这种情况下，我的研究计划的总体目标是进行基础材料研究，对未来几代MEMS/NEMS的设计具有直接和直接的影响，这些MEMS/NEMS具有增强的功能，改进的性能和更高的可靠性。