Structure-Property Relationships for Designing Multifunctional Microsystems and Nanosystems

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For the past 10 years, my research program at McGill University has focused on: (i) obtaining a deep understanding of the mechanical behavior of microscale thin-film materials; and (ii) translating this knowledge to industrial practice by developing a multitude of microelectromechanical systems (MEMS) technologies. Thus, discovery and innovation are equally important to my research program and activities. This program has made a direct impact on a broad community of engineers, scientists, and educators around the world. My research has been used by academic and industrial research groups to design microelectronics, MEMS, and opto-mechanical systems for a diverse set of applications that range from sensing and signal processing to energy harvesting, portable power generation, and scanning probe microscopy. A major theme of current research worldwide is the use of nanomaterials to add valuable functionality to future generation of MEMS, and to create entirely new classes of nanoelectromechanical systems (NEMS) and nanomachines. Nanomaterials can revolutionize a large and diverse set of miniaturized technologies that are vital to our society, economy, and quality-of-life. However, many formidable engineering and scientific challenges must be tackled in order to translate this rich potential into practical reality. These challenges motivate and set the future directions of my research program. My long-term vision is to obtain a detailed understanding of the mechanical behavior of nanoscale materials and structures; and then apply this knowledge to create high-impact, high-value miniaturized technologies. As a step towards that goal, I propose a 5-year research program with the following objectives: (i) Design and implement a unique Nanomembrane Platform for measuring nanomechanical properties (specifically, material damping, residual stress, and anelastic relaxation) in ultrathin films and nanofabricated structures with thickness ranging from 1 to 100 nm; and (ii) Apply the Nanomembrane Platform to design high-performance, multifunctional nanomechanical devices for applications in the classical and quantum regimes. Thus, materials research will be closely integrated with device design. The Nanomembrane Platform has the potential to become a powerful and valuable tool to enable the design and development of a large array of revolutionary nanomechanical technologies. It will sustain and enhance our reputation for world-leading research in material damping at micrometer and nanometer length scales, and enable us to become a world leader in developing advanced materials and structures for groundbreaking quantum nanomechanical technologies.The proposed program is well suited for training HQP because it provides innumerable opportunities for making innovative, scientifically-interesting and technologically-relevant contributions. During the next five years, four graduate students (two PhD and two Masters), ten undergraduate students, and one Research Associate will work full-time on the proposed program to design, implement, and apply the Nanomembrane Platform. My goal is to create a harmonious, multidisciplinary training environment where students enjoy the freedom to explore their ideas; learn valuable experimental, analytical, and computational skills; and acquire the wisdom and integrity to use their skills for the benefit of humanity. During the past six years, I trained thirty seven HQP. My students have contributed to world-class research, most notably to studies of energy dissipation and damping in thin films and micromechanical resonators. After completing their studies, all students moved on to positions in academia and industry that require highly desired skills.