ANR - Development and Qualification of Miniature MEMS Switch Matrices for Space Applications

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This is a joint Canadian-French proposal submitted in response to the first NSERC-ANR call for proposals announced by NSERC in January 2009. The participants of this proposal are: the University of Waterloo (Waterloo, Ontario), CEA-LETI (Grenoble, France), IMEP( Grenoble, France), COM DEV (Cambridge, Ontario) and NovaMEMS (Toulouse, France). The proposal deals with the use of Micro-Electro-Mechanical Systems (MEMS) technology to develop and qualify miniature radio frequency (RF) switch matrices for space applications. The satellite communication industry in Canada is an area of strategic national interest. It is enjoying phenomenal growth with a market that remains fueled by the increased demands for multi-media services. Switches and switch matrices represent a critical and substantive portion of a satellite payload. They are used to provide on-board equipment redundancy and for signal routing. The MEMS technology offers not only a reduction in mass, size and dc power consumption but also the promise of a superior performance to that of the current technologies. The project encompasses the development of novel RF MEMS switches and switch matrices with a focus on improving reliability for space-based applications. It builds on the strengths of the academic team members in RF engineering and MEMS fabrication and characterization. The Canadian industrial partner, COM DEV, is the world's largest supplier of switch matrices for space applications. The French industrial partner, NovaMEMS, specializes in failure analysis and reliability assessment of micro and nano technologies. The research team has all the expertise and heritage needed to succeed in this endeavor. We regard this project as critical for showcasing the benefits and viability of the MEMS technology and encouraging satellite prime contractors to adopt this new generation of switch technology in future commercial satellite systems.