"Precision Motion Systems Modeling, Analysis, and Control"

在许多产品的自动化制造中，例如用于医疗诊断的基于MEMS的血液盒或用于电信的多芯片光学模块，部件需要在多个平移和旋转方向上相对于彼此精确地放置。制造设备中运动系统的速度和精度决定了这些高附加值产品制造过程的生产率和质量。目前，大多数用于制造自动化的运动系统是通过将多个单自由度（DOF）平台堆叠在一起以实现多自由度运动来构造的，这遭受累积误差、刚度降低和成本增加。对制造精度和生产率不断提高的要求，要求新的运动系统技术。

In automated manufacturing of many products, such as a MEMS-based blood cartridge for medical diagnosis or a multiple chip optical module used in telecommunication, parts need to be placed precisely relative to each other in multiple translation and rotation directions. The speed and precision of motion systems in manufacturing equipment determine the productivity and quality of the manufacturing process of these high value-added products. Currently, most motion systems used in manufacturing automation are constructed by stacking up many single degree-of-freedom (DOF) stages together to achieve multi-DOF motion, which suffer from accumulated errors, reduced stiffness and increased cost. The ever-increasing requirements of manufacturing precision and productivity demand a new motion system technology.