"Precision Motion Systems Modeling, Analysis, and Control"

在许多产品的自动化制造中，例如用于医疗诊断的基于mems的血液盒或用于电信的多芯片光学模块，零件需要在多个平移和旋转方向上精确地相对放置。制造设备中运动系统的速度和精度决定了这些高附加值产品制造过程的生产率和质量。目前，制造自动化中使用的运动系统大多是将多个单自由度（DOF）阶段叠加在一起来实现多自由度运动，这种方法存在误差累积、刚度降低和成本增加的问题。不断提高的制造精度和生产效率要求新的运动系统技术。

In automated manufacturing of many products, such as a MEMS-based blood cartridge for medical diagnosis or a multiple chip optical module used in telecommunication, parts need to be placed precisely relative to each other in multiple translation and rotation directions. The speed and precision of motion systems in manufacturing equipment determine the productivity and quality of the manufacturing process of these high value-added products. Currently, most motion systems used in manufacturing automation are constructed by stacking up many single degree-of-freedom (DOF) stages together to achieve multi-DOF motion, which suffer from accumulated errors, reduced stiffness and increased cost. The ever-increasing requirements of manufacturing precision and productivity demand a new motion system technology.