"Precision Motion Systems Modeling, Analysis, and Control"

点击翻译按钮获取中文摘要

In automated manufacturing of many products, such as a MEMS-based blood cartridge for medical diagnosis or a multiple chip optical module used in telecommunication, parts need to be placed precisely relative to each other in multiple translation and rotation directions. The speed and precision of motion systems in manufacturing equipment determine the productivity and quality of the manufacturing process of these high value-added products. Currently, most motion systems used in manufacturing automation are constructed by stacking up many single degree-of-freedom (DOF) stages together to achieve multi-DOF motion, which suffer from accumulated errors, reduced stiffness and increased cost. The ever-increasing requirements of manufacturing precision and productivity demand a new motion system technology.