Low-cost batch fabrication method of high aspect ratio AFM tips

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Atomic force microscope (AFM) is the most popular characterization tool among the scanning probe microscope (SPM) family. Compared to scanning electron microscope (SEM), AFM has lower cost, much more accurate (by one order) in the z-direction and x-y direction if the sample is flat, and can work equally well with insulating sample or even inside a liquid environment. Nevertheless, SEM is still far more popular than AFM for topographical structure characterization, mostly because of the intrinsic limit in the AFM image when mapping a none-flat surface (e.g a deep and narrow hole/trench) where the tip cannot fully follow the sample surface. The natural solution to overcome this issue is by using thin and high aspect ratio tips that can follow the sample surface more precisely.