Materials systems for engineering optical and fluidic devices fabricated via three-dimensional nanoscale interference lithography

干涉光刻是一种非常可靠的方法，用于制造具有连续孔网络的无缺陷三维纳米结构。这种多孔纳米结构具有很大的光学应用潜力，因为光与特征纳米尺度的相互作用很强。在流体应用中也存在巨大的潜力，其中形成连续网络的纳米级通道可以通过材料的选择和通道的精确纳米尺寸来定制特性。进一步的可能性是利用纳米级结构的光学和流体能力来形成光流体器件。潜在的假设是，干涉光刻产生的大型无缺陷图案非常适合工程纳米结构材料，这些材料可以有效而紧凑地结合光流体相互作用。该研究计划的直接目标是：1)开发可靠的方法，通过光阻干涉光刻技术制造出大规模的块状薄膜，然后将其倒置或填充战略材料；2)开发利用流体试剂在纳米多孔材料上进行后续大尺度和精细尺度图案叠加的技术；3)测量和设计纳米结构多孔材料内部流体流动产生的光信号。快速成型方法将用于溶剂铸造、电沉积和溶胶-凝胶沉积材料，以快速评估结构质量、工艺兼容性和材料适用性。最有希望的材料组合将用于制造三维多孔纳米结构。纳米结构内部的材料选择和内部材料分布将被控制，以设计光子和流体之间有利的相互作用。这项研究可以提供更经济的太阳能收集，因为太阳光线照射设备的角度可以通过纳米结构内部的流体来调整，以保持对微型嵌入式光伏电池的关注。进一步的应用可能出现在敏感、紧凑和廉价的微流体光学传感器上。

Interference lithography is an exceptionally robust method for fabricating defect-free three-dimensional nanostructures with a continuous network of pores. Such porous nanostructures have great potential for optical applications as the light interacts strongly with the characteristic nanoscale dimensions. Great potential also exists in fluidic applications, where the nanoscale channels forming continuous networks can have tailored properties bestowed by both the choice of materials and the exact nanoscale dimensions of the channels. Further possibilities are had by using both the optical and fluidic capabilities of the nanoscale structures to form optofluidic devices. The underlying hypothesis is that the large defect-free patterns created by interference lithography are highly suitable for engineering nanostructured materials that effectively and compactly combine light-fluid interactions. The immediate goals of the research program are: 1) To develop methods to reliably create large-scale bulk films patterned by interference lithography of photoresists, which will then be inverted or infilled with strategic materials; 2) To develop techniques employing fluid reagents for subsequent large-scale and fine-scale patterning superimposed on the nanostructured porous materials; 3) To measure and engineer the optical signals arising from fluid flowing inside the nanostructured porous materials. Rapid prototyping methods will be employed with solvent casting, electrodeposition, and sol-gel deposition of materials to quickly assess structure quality, process compatibility, and material suitability. The most promising combinations of materials will then be employed in fabricating three-dimensional porous nanostructures. The material choices and internal material distribution inside the nanostructures will be manipulated in order to engineer a favourable interaction between photons and the fluid. This research could provide more economical solar energy collection as the angle at which the sun's rays strike the device can be adjusted for by fluids inside the nanostructure, to maintained focus on tiny embedded photovoltaic cells. Further applications could arise in sensitive, compact, and inexpensive microfluidic-optical sensors.