Quantized structuring of transparent film and plates with ultrfast laser interference and filamentation

利用超快激光干涉和成丝对透明薄膜和板材进行量化结构化

• 批准号: 463417-2014
• 负责人: Herman, Peter
• 金额: $ 11.43万
• 依托单位: University of Toronto
• 依托单位国家: 加拿大
• 项目类别: Strategic Projects - Group
• 财政年份: 2014
• 资助国家: 加拿大
• 起止时间: 2014-01-01 至 2015-12-31
• 项目状态: 已结题
• 来源: https://www.nserc-crsng.gc.ca/ase-oro/Details-Detailles_eng.asp?id=558395
• 关键词: Quantized; structuring; transparent; film; plates

Nano-structuring of materials is the basis of rapidly expanding application areas where ultrashort lasers are becoming a tool of choice with benefits of non-contact processing that precisely shape and pattern with very little residual damage. Short-pulsed lasers further underpin a unique capability for 3D structuring inside transparent glasses. In this direction, a new research project is proposed around our recent discovery of a novel laser interferometric interaction discovered in silicon-nitride film that underlies a new means for laser material nanostructuring. Here, optical interference fringes are formed parallel with the surface that for the first time can create thin laser plasma disks and form lateral modification zones, nanocavities, thin blisters and quantized ejection from interaction zones substantially narrower than is possible even when focusing with high resolution lenses. This new means of control has not been previously anticipated, and is especially attractive in high temperature dielectric media like optical films that find widespread use in processing microelectronic, optical, lab-on-chip, photonic, MEMs, and photovoltaic devices.

材料的纳米结构化是快速扩展应用领域的基础，超短激光正成为首选工具，具有非接触式加工的优势，可精确成形和图案，残留损伤极小。短脉冲激光进一步巩固了透明玻璃内部3D结构的独特能力。在这个方向上，提出了一个新的研究项目，围绕我们最近发现的一种新的激光干涉相互作用，发现在氮化硅薄膜的基础上的激光材料纳米结构的新手段。这里，光学干涉条纹形成为与表面平行，其首次可以产生薄的激光等离子体盘并形成横向修改区、纳米腔、薄气泡和从相互作用区的量化喷射，即使在用高分辨率透镜聚焦时也比可能的要窄得多。 这种新的控制手段以前没有预料到，并且在高温介电介质如光学膜中特别有吸引力，所述光学膜广泛用于处理微电子、光学、芯片实验室、光子、MEMS和光伏器件。