Micro and nano mechanical fabrication of miniature devices

许多人认为，零部件的小型化是未来各种产品技术发展的重要要求。制造微米和纳米级原型的典型光刻工艺具有挑战性，可能会导致代价高昂的延迟(通常需要几个月)；而且，它们的使用仅限于几种平面几何图形的材料，主要是硅基材料。这项研究的目的是通过对各种材料采用减法和加法工艺的协同集成来克服现有光刻制造技术带来的障碍。这可以通过亚微米和微机械加工来实现，使用配备了纳米级加工的原子力显微镜和高速微型数控机床来制造微型部件。为了进一步大规模生产，制造的微型模具将用于微注射成型，以制造聚合物和复合材料部件，如芯片实验室、光栅板、电子学、微流体等。 由于从宏观到微观和纳米的规模缩小，存在着几个挑战。需要对微纳尺度的力进行精确的建模和测量，以便在制造微型零部件时提供灵活性、生产率和精确度。影响加工过程的高频动力学将通过子结构的数学耦合进行研究；通过振动辅助切割的混合加工将减少力并获得所需的纹理。微注射成型将使我们能够以一小部分的成本和时间制造微型设备，并将检查影响塑料熔体通过微型模具流动的参数。这一使能研究将通过弥合宏观世界与纳微领域之间的差距，在微米和纳米尺度的制造过程中做出原创性的贡献。它被设想为创新的微纳系统发展的首选技术。

The miniaturization of components is perceived by many as an important requirement for the future technological development of a broad spectrum of products. The typical photo-lithographic processes for fabricating micro- and nano-scale prototypes have challenges that can result in costly delays (often taking months); and, their use is limited to a few, mainly silicon-based, materials for planar geometries. The aim of this research is to overcome the hurdles posed by the existing lithographic fabrication technologies by employing synergistic integration of subtractive and additive processes for a variety of materials. This can be achieved through sub-micro- and micro-mechanical machining to fabricate miniature components using an atomic force microscope, which is equipped for machining at the nano-scale, and high-speed micro-CNC machines. For further mass production, fabricated micro moulds will be used in micro injection moulding to manufacture polymeric and composite components, such as lab-on-chips, optical grating plates, electronics, micro fluidics, etc. There are several challenges due to the decrease in scale from macro to micro and nano. Accurate modeling and measurement of micro- and nano-scale forces are needed to provide flexibility, productivity and accuracy in manufacturing miniature components. High-frequency dynamics, which influence machining processes, will be investigated by mathematical coupling of substructures; and, hybrid machining through vibration-assisted cutting will decrease the forces and achieve desired textures. Micro injection moulding will enable us to create miniature devices for a fraction of the cost and time, and parameters that influence molten plastics flow through micro moulds will be examined. This enabling research will make original contributions in micro- and nano-scale manufacturing processes by bridging the gap between the macro world and the nano and micro domains. It is envisaged as the technology of choice for the advancement of innovative micro and nano systems.