Micro and nano mechanical fabrication of miniature devices

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The miniaturization of components is perceived by many as an important requirement for the future technological development of a broad spectrum of products. The typical photo-lithographic processes for fabricating micro- and nano-scale prototypes have challenges that can result in costly delays (often taking months); and, their use is limited to a few, mainly silicon-based, materials for planar geometries. The aim of this research is to overcome the hurdles posed by the existing lithographic fabrication technologies by employing synergistic integration of subtractive and additive processes for a variety of materials. This can be achieved through sub-micro- and micro-mechanical machining to fabricate miniature components using an atomic force microscope, which is equipped for machining at the nano-scale, and high-speed micro-CNC machines. For further mass production, fabricated micro moulds will be used in micro injection moulding to manufacture polymeric and composite components, such as lab-on-chips, optical grating plates, electronics, micro fluidics, etc. There are several challenges due to the decrease in scale from macro to micro and nano. Accurate modeling and measurement of micro- and nano-scale forces are needed to provide flexibility, productivity and accuracy in manufacturing miniature components. High-frequency dynamics, which influence machining processes, will be investigated by mathematical coupling of substructures; and, hybrid machining through vibration-assisted cutting will decrease the forces and achieve desired textures. Micro injection moulding will enable us to create miniature devices for a fraction of the cost and time, and parameters that influence molten plastics flow through micro moulds will be examined. This enabling research will make original contributions in micro- and nano-scale manufacturing processes by bridging the gap between the macro world and the nano and micro domains. It is envisaged as the technology of choice for the advancement of innovative micro and nano systems.