Micro and nano mechanical fabrication of miniature devices

微型器件的微纳机械制造

• 批准号: 283188-2010
• 负责人: Park, Simon
• 金额: $ 2.04万
• 依托单位: University of Calgary
• 依托单位国家: 加拿大
• 项目类别: Discovery Grants Program - Individual
• 财政年份: 2015
• 资助国家: 加拿大
• 起止时间: 2015-01-01 至 2016-12-31
• 项目状态: 已结题
• 来源: https://www.nserc-crsng.gc.ca/ase-oro/Details-Detailles_eng.asp?id=571323
• 关键词: Micro; nano; mechanical; fabrication; miniature

The miniaturization of components is perceived by many as an important requirement for the future technological development of a broad spectrum of products. The typical photo-lithographic processes for fabricating micro- and nano-scale prototypes have challenges that can result in costly delays (often taking months); and, their use is limited to a few, mainly silicon-based, materials for planar geometries. The aim of this research is to overcome the hurdles posed by the existing lithographic fabrication technologies by employing synergistic integration of subtractive and additive processes for a variety of materials. This can be achieved through sub-micro- and micro-mechanical machining to fabricate miniature components using an atomic force microscope, which is equipped for machining at the nano-scale, and high-speed micro-CNC machines. For further mass production, fabricated micro moulds will be used in micro injection moulding to manufacture polymeric and composite components, such as lab-on-chips, optical grating plates, electronics, micro fluidics, etc. There are several challenges due to the decrease in scale from macro to micro and nano. Accurate modeling and measurement of micro- and nano-scale forces are needed to provide flexibility, productivity and accuracy in manufacturing miniature components. High-frequency dynamics, which influence machining processes, will be investigated by mathematical coupling of substructures; and, hybrid machining through vibration-assisted cutting will decrease the forces and achieve desired textures. Micro injection moulding will enable us to create miniature devices for a fraction of the cost and time, and parameters that influence molten plastics flow through micro moulds will be examined. This enabling research will make original contributions in micro- and nano-scale manufacturing processes by bridging the gap between the macro world and the nano and micro domains. It is envisaged as the technology of choice for the advancement of innovative micro and nano systems.

元件的小型化被许多人认为是未来广泛产品技术发展的重要要求。用于制造微米级和纳米级原型的典型光刻工艺具有挑战性，可能导致昂贵的延迟（通常需要数月）;并且，它们的使用仅限于用于平面几何形状的几种材料，主要是硅基材料。本研究的目的是克服现有的光刻制造技术所带来的障碍，采用协同集成的减和添加剂的各种材料的过程。这可以通过亚微米和微机械加工来实现，以使用原子力显微镜制造微型部件，该显微镜配备用于纳米级加工和高速微型CNC机床。为了进一步大规模生产，制造的微模具将用于微注塑成型，以制造聚合物和复合材料组件，例如芯片实验室，光栅板，电子器件，微流体等。 由于从宏观到微观和纳米的尺度减小，存在若干挑战。需要精确建模和测量微米和纳米尺度的力，以提供制造微型部件的灵活性、生产率和精度。高频动力学，影响加工过程，将通过子结构的数学耦合进行研究;和，通过振动辅助切削混合加工将减少力，并实现所需的纹理。微注塑成型将使我们能够以一小部分成本和时间制造微型设备，并将检查影响熔融塑料流过微模具的参数。这项研究将在微观和纳米尺度的制造过程中，通过弥合宏观世界与纳米和微观领域之间的差距作出原创性贡献。它被设想为创新的微米和纳米系统的进步的首选技术。