Generation and characterization of large angular deflection employing MEMS photonic devices

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Preciseley Microtechnology Corp. is a MEMS product company located in Edmonton, Canada at the NRC National Institute for Nanotechnology's Innovation Center. The company has developed MEMS devices, such as single mirror, mirror arrays, optical shutter, and 1xN switch, for applications in optics and photonics. Recently, my research group demonstrated nanomaterial based flexible optical diffusers, and light passing through our optical diffusers will be diffracted to large angles compared to the incident direction. In the proposal, we aim to integrate our optical diffuser with the company's MEMS devices to achieve large angular deflection of incident light. Furthermore, we will characterize the spatial angle of deflected light.