Generation and characterization of large angular deflection employing MEMS photonic devices

精密微技术公司是一家MEMS产品公司，位于加拿大埃德蒙顿NRC国家纳米技术研究所创新中心。该公司已经开发了MEMS器件，如单镜，镜阵列，光学快门和1xN开关，用于光学和光子学应用。最近，我的研究小组展示了基于纳米材料的柔性光学漫射器，光通过我们的光学漫射器将被衍射到与入射方向相比的大角度。在提案中，我们的目标是将我们的光漫射器与公司的MEMS器件集成在一起，以实现入射光的大角偏转。此外，我们将表征偏转光的空间角。

Preciseley Microtechnology Corp. is a MEMS product company located in Edmonton, Canada at the NRC National Institute for Nanotechnology's Innovation Center. The company has developed MEMS devices, such as single mirror, mirror arrays, optical shutter, and 1xN switch, for applications in optics and photonics. Recently, my research group demonstrated nanomaterial based flexible optical diffusers, and light passing through our optical diffusers will be diffracted to large angles compared to the incident direction. In the proposal, we aim to integrate our optical diffuser with the company's MEMS devices to achieve large angular deflection of incident light. Furthermore, we will characterize the spatial angle of deflected light.