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Low cost and high throughput manufacturing of high aspect ratio AFM probes

Low cost and high throughput manufacturing of high aspect ratio AFM probes
高深宽比 AFM 探针的低成本和高产量制造
批准号:
490538-2015
负责人:
Cui, Bo
金额:
$2.91万
依托单位:
依托单位国家:
加拿大
项目类别:
Collaborative Research and Development Grants
财政年份:
2016
资助国家:
加拿大
项目状态:
已结题
起止时间:
2016-01-01 至 2017-12-31

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中文摘要
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英文摘要
A widely used tool in nano-scale characterization is the Atomic Force Microscope (AFM), with popular applications in large semiconductor companies such as IBM, Intel, AMD and Seagate for the quality assurance of their chips and small electronics. It is also widely used in a variety of research fields and emerging technologies. The most important part of the AFM is the probe or tip which "feels" the sample surface and creates a three-dimensional image of the specimen surface. In order to obtain high quality faithful images, very high aspect ratio tips are required; that is, the tip apex has to be thin and long. But these high aspect ratio tips are extremely difficult to make and consequently very expensive ($70-$500 per tip) and only bought sparingly.
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