Tools for the CRPuO Nanofab - an open access user facility

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This proposal seeks funding to add several tools to the CRPuO Nanofab, a core nanofabrication facility at the University of Ottawa. The Nanofab is broadly accessible and under the management of the Centre for Research in Photonics at uOttawa (CRPuO), which has a membership of 24 professors directing over 200 research personnel and students. The facility is accessed by several internal and external users - currently 55 PDFs and graduate students - to fabricate devices and structures of interest in photonics, microfluidics, MEMS (microelectromechanical systems) and electronics for applications across varied fields such as biomedical engineering, biophysics, alternative energy, and information and communications technologies. This is the only non-captive accessible nanofabrication facility in Eastern Ontario - its user base, which consists mostly of students and post-doctoral fellows, spans the region, reaching into Montreal. Researchers from several departments within the University of Ottawa, from Carleton Universities, and from the National Research Council depend on this facility for critical aspects of their work. The facility also supports several international research projects and university-industry research partnerships.