Optical phased array based on electrically tunable plasmonic nanoantennas

本课题提出一种基于电可调谐等离子体纳米天线的光学相控阵，用于光束导向。有3个目标：(i)模拟和设计纳米天线，可以电调谐并组装成相控阵；（ii）开发纳米制造工艺和制造阵列，以及（iii）表征和演示用于光束转向的阵列。这些目标将首先通过电调谐等离子体纳米天线概念的设计和建模来实现，然后通过在洁净室环境中使用标准半导体制造工具应用晶圆级纳米制造工艺来实现纳米天线阵列。该阵列将在使用商用组件、定制加工部件以及为阵列控制、数据采集和处理设计和编写的软件构建的设置中进行测试。阵列的操作将通过波束转向的应用来演示，最初在一维，然后，最终，在二维。考虑的自由空间波长包括1550 nm，这是电信应用感兴趣的波长，以及900 nm，这是激光雷达应用感兴趣的波长。项目完成后，成果，包括技术，其以光学相控阵形式的体现，以及相关的电子控制协议将转让给工业合作伙伴。对加拿大工业的好处包括为光束转向应用提供一种新的光学相控阵技术，适用于光纤网络中的光交换或汽车领域的扫描激光雷达应用。通过该项目形成的高素质人才（HQP）将发展在工业界和学术界高度重视的技能。

This project proposes an optical phased array based on electrically-tunable plasmonic nanoantennas for optical beam steering. There are 3 objectives: (i) to model and design nanoantennas that can be tuned electrically and assembled into a phased array; (ii) to develop nanofabrication processes and to fabricate the arrays, and (iii) to characterise and demonstrate the arrays for optical beam steering. These objectives will be met, initially through the design and modelling of concepts for electrically-tunable plasmonic nanoantennas, then through implementation of arrays of nanoantennas by applying wafer-scale nanofabrication processes using standard semiconductor fabrication tools in a cleanroom setting. The arrays will be tested in a set-up constructed using commercially-available components, custom-machined parts, and software designed and written for array control, data acquisition and processing. Operation of the arrays will be demonstrated by application to beam-steering, initially in one dimension, then, ultimately, in two dimensions. Operating free-space wavelengths to be considered include 1550 nm, which is of interest to telecommunications applications, and 900 nm, which is of interest to Lidar applications. Upon completion of the project, the outcomes, consisting of the technology, its embodiments in the form of optical phased arrays, and the associated electronic control protocols will be transferred to the industrial partner. The benefits to Canadian industry include the provision of a new optical phased array technology for beam steering applications, suitable for optical switching in optical fibre networks or scanning Lidar applications in the automotive sector. The highly-qualified personnel (HQP) formed through this project will develop skills that are highly valued within industry and academia.