Tools for back-end processing in a core nanofabrication facility

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This proposal seeks funding to add three back-end processing tools, consisting of a high-precision dicing saw, a sample polishing station and a high-resolution optical inspection microscope to a core nanofabrication facility at the University of Ottawa. The facility is broadly accessible as a recognised core facility of uOttawa, with a membership of 20 professors directing over 200 research personnel and students. The facility is accessed by several internal and external users to fabricate devices and structures of interest in photonics, microfluidics, MEMS (microelectromechanical systems) and electronics for applications across varied fields such as biomedical engineering, biophysics, alternative energy, and information and communications technologies. This is the only non-captive accessible nanofabrication facility in Eastern Ontario - its user base, which consists mostly of students and post-doctoral fellows, spans the region, reaching into Montreal. Researchers from several departments within the University of Ottawa, from Carleton and McGill Universities, and from the National Research Council depend on this facility for critical aspects of their work. The facility also supports several international research projects and university-industry research partnerships.