An Atomic Force Microscope inside FIB-SEM for in-Situ Nanomaterial Characterization

点击翻译按钮获取中文摘要

Advances in nanomaterial synthesis have resulted in a plethora of novel functional materials. Characterization is critical for guiding nanomaterials design and identifying strategies to optimize nanomaterials-enabled applications (e.g., high-performance batteries and biosensors). With CFI support, a dual-beam focused ion beam - scanning electron microscope (FIB-SEM) was recently installed at UofT for open access to support the numerous nanotechnology research efforts inside and outside UofT. The FIB-SEM has high milling and imaging resolutions and is equipped with a number of detectors and modules for detecting secondary and backscattered electrons (e.g., energy-dispersive spectroscopy—EDS and electron backscatter diffraction—EBSD). While the instrument is powerful for structural imaging, materials milling and deposition, and chemical/material analysis, it lacks the important capability of mechanical, electrical, and optical measurements on single nanostructures for in-situ characterization.