High Throughput Energy Dispersive Spectrometer for Plasma Focused Ion Beam

我们正在为麦克马斯特大学最近购买的等离子体聚焦离子束扫描电子显微镜（PFIB）申请高通量能量色散X射线光谱（EDS）检测器，这是加拿大第一台此类工具。 该分析附件对于X射线分析和绘图至关重要，以便在PFIB连续切片期间识别样品的化学成分并重建三维化学图。这一工具还将使研究人员能够利用光谱化学信息对感兴趣的区域进行化学鉴定，以便随后进行切片和研磨。该工具对于随后需要在透射电子显微镜和3D原子探针中分析的材料中的相的识别也是必不可少的。若干研究小组将受益于所要求的文书。项目包括锂电池材料的3D结构分析、核电站使用的蒸汽发生器材料的裂缝分析、发光二极管的开发、复合混凝土材料的分析、地球上最古老的地质材料的分析、月球样品、光子结构和超材料。我们迫切需要这些工具来正确识别材料，并利用Plasma FIB独特的高产量铣削能力在三维空间中正确重建材料。该工具还将使其能够更快地对样本进行反馈，更可靠地解释结果，更快地取得研究进展，从而产生更具相关性和国际竞争力的出版物。除了7个研究小组及其47名HQP之外，他们在拟议项目中的18名合作者（及其HQP）参与依赖该工具的研究和工业合作伙伴，该仪器将位于加拿大电子显微镜中心（CCEM），一个真正开放的--由重大科学倡议支持的访问设施，并由一个用户组监督，该用户组强调了对该工具和该应用程序的需求。该中心每年为430多名使用该设施中多种工具的用户提供支持，包括PFIB。他们还将使用这种HT-EDS仪器进行工作。CCEM设施由专门的技术人员操作所有仪器工具，这些技术人员培训用户正确操作其操作的所有仪器，从而确保设备得到广泛和有效的使用。

We are requesting a high-throughput energy dispersive X-ray spectrometry (EDS) detector for the plasma focused ion beam scanning electron microscope (PFIB) recently purchased by McMaster University, the first such tool in Canada. This analytical attachment is essential for X-ray analysis and mapping in order to identify the chemical composition of sample and to reconstruct chemical maps in 3-Dimensions during serial sectioning with the PFIB. This tool will also enable the chemical identification of the areas of interest for subsequent sectioning and milling using the spectroscopic chemical information as a guide to the researcher. The tool is also indispensable for the identification of phases in materials that need to be analysed subsequently in the transmission electron microscope and the 3D atom probe. Several research groups will benefit from the requested instrument. Projects include the analysis of the 3D structure of Li battery materials, the analysis of cracks in steam generator materials used in nuclear power plants, the development of light emitting diodes, the analysis of composite concrete materials, the analysis of the oldest geological materials on earth, lunar samples, photonic structures and metamaterials. The tools is urgently required to enable the correct identification of materials, the correct reconstruction of materials in 3-dimensions taking advantage of the unique high-throughput milling capabilities of the Plasma FIB. The tool will also enable faster feedback on their samples, more reliable interpretation of results and faster progress in research, leading to more relevant and internationally competitive publication. Beyond the 7 research groups with their 47 HQP, their 18 collaborators in the proposed projects (and their HQP) involved in the research and industrial partners relying on this tool, the instrument will be located at the Canadian Centre for Electron Microscopy (CCEM), a truly open-access facility supported by the Major Science Initiative with oversight from a user's group who highlighted the need for this tool and this application. The Centre supports over 430 users annually who use multiple tools in the facility, including the PFIB. They will also use this HT-EDS instrumentation for their work. The CCEM facility operates all instrument tools with dedicated technical staff who train users on the proper operation of all instruments it operates, thus ensuring that the equipment will be used widely and effectively.