High Throughput Energy Dispersive Spectrometer for Plasma Focused Ion Beam

麦克马斯特大学最近购买了一种高通量能量色散x射线光谱（EDS）探测器，用于等离子体聚焦离子束扫描电子显微镜（PFIB），这是加拿大第一个这样的工具。这个分析附件对于x射线分析和绘图是必不可少的，以便在PFIB连续切片过程中识别样品的化学成分并重建三维化学图。该工具还可以利用光谱化学信息作为研究人员的指导，对感兴趣的区域进行化学鉴定，从而进行后续的切片和铣削。该工具对于随后在透射电子显微镜和3D原子探针中需要分析的材料中的相识别也是必不可少的。几个研究小组将受益于所要求的仪器。项目包括锂电池材料的三维结构分析、核电站蒸汽发生器材料裂缝分析、发光二极管的开发、复合混凝土材料分析、地球上最古老的地质材料分析、月球样品、光子结构和超材料。目前迫切需要这些工具来正确识别材料，并利用等离子体FIB独特的高通量铣削能力在三维空间中正确重建材料。该工具还将使对样本的反馈更快，对结果的解释更可靠，研究进展更快，从而导致更具相关性和国际竞争力的出版物。除了拥有47个HQP的7个研究小组，他们在拟议项目（及其HQP）中参与研究的18个合作者和依赖该工具的工业合作伙伴之外，该仪器将位于加拿大电子显微镜中心（CCEM），这是一个真正的开放获取设施，由重大科学计划支持，并由用户小组监督，他们强调了该工具和该应用的需求。该中心每年为430多名用户提供支持，这些用户在设施中使用多种工具，包括PFIB。他们还将使用这种HT-EDS仪器进行工作。CCEM设施由专门的技术人员操作所有仪器工具，培训用户正确操作其操作的所有仪器，从而确保设备得到广泛和有效的使用。

We are requesting a high-throughput energy dispersive X-ray spectrometry (EDS) detector for the plasma focused ion beam scanning electron microscope (PFIB) recently purchased by McMaster University, the first such tool in Canada. This analytical attachment is essential for X-ray analysis and mapping in order to identify the chemical composition of sample and to reconstruct chemical maps in 3-Dimensions during serial sectioning with the PFIB. This tool will also enable the chemical identification of the areas of interest for subsequent sectioning and milling using the spectroscopic chemical information as a guide to the researcher. The tool is also indispensable for the identification of phases in materials that need to be analysed subsequently in the transmission electron microscope and the 3D atom probe. Several research groups will benefit from the requested instrument. Projects include the analysis of the 3D structure of Li battery materials, the analysis of cracks in steam generator materials used in nuclear power plants, the development of light emitting diodes, the analysis of composite concrete materials, the analysis of the oldest geological materials on earth, lunar samples, photonic structures and metamaterials. The tools is urgently required to enable the correct identification of materials, the correct reconstruction of materials in 3-dimensions taking advantage of the unique high-throughput milling capabilities of the Plasma FIB. The tool will also enable faster feedback on their samples, more reliable interpretation of results and faster progress in research, leading to more relevant and internationally competitive publication. Beyond the 7 research groups with their 47 HQP, their 18 collaborators in the proposed projects (and their HQP) involved in the research and industrial partners relying on this tool, the instrument will be located at the Canadian Centre for Electron Microscopy (CCEM), a truly open-access facility supported by the Major Science Initiative with oversight from a user's group who highlighted the need for this tool and this application. The Centre supports over 430 users annually who use multiple tools in the facility, including the PFIB. They will also use this HT-EDS instrumentation for their work. The CCEM facility operates all instrument tools with dedicated technical staff who train users on the proper operation of all instruments it operates, thus ensuring that the equipment will be used widely and effectively.