Compact and Energy Efficient Wireless Microelectromechanical Sensing Systems

紧凑且节能的无线微机电传感系统

• 批准号: RGPIN-2016-04871
• 负责人: Nabki, Frederic
• 金额: $ 2.26万
• 依托单位: École de technologie supérieure
• 依托单位国家: 加拿大
• 项目类别: Discovery Grants Program - Individual
• 财政年份: 2018
• 资助国家: 加拿大
• 起止时间: 2018-01-01 至 2019-12-31
• 项目状态: 已结题
• 来源: https://www.nserc-crsng.gc.ca/ase-oro/Details-Detailles_eng.asp?id=660549
• 关键词: Compact; Energy; Efficient; Wireless; Microelectromechanical

Like integrated circuits (ICs), microelectromechanical systems (MEMS) are a disruptive technology, enhancing systems and enabling new applications. The MEMS market is expanding at an increasing rate, projected to almost double from $11B in 2014 to $21B in 2020 [Yole, 2015]. Recently, MEMS sensors have had an increased presence, notably in wearables (e.g. smartwatches, fitness trackers) and sensor nodes (e.g. tracking, weather forecasting), where many sensors are combined. This warrants tighter integration to allow for more compact systems, and requires wireless interfaces to transmit sensor telemetry and allow for more mobility. Such sensors are suited to the upcoming Internet-of-Things, where large numbers of small and autonomous sensor nodes, independent of power and wiring infrastructure, are expected to be deployed with a much reduced deployment overhead.******ICs can enable the circuitry required within such compact MEMS sensors. However, single-package integration with multiple MEMS remains difficult because of microfabrication process incompatibilities and specific design intricacies. Furthermore, energy efficiency is becoming a key challenge to system integration, as there is a strong push to deploy sensors into devices with smaller batteries, having insufficient energy capacity for the desired functionalities. Efficiency can be improved by reducing the power consumption of the wireless and interface electronics, and enhancing the sensor with energy harvesters.******Accordingly, the vision of this research program is to integrate traditionally disjointed functions of sensing systems (i.e., transducer, sensing interface, wireless communication, and energy source) within a single package or, ultimately, a single die. Prof. Nabki will use his research expertise, recent progress and unique MEMS, ICs and integration technologies to attain this vision by pursuing 3 short term research objectives: i) elaborate MEMS transducers well-suited to above-IC integration and to transducer fusion; ii) investigate highly energy-efficient sensing interfaces and wireless communication ICs; and iii) explore hybrid mechanical energy harvesters to increase sensor energy efficiency.******Ultimately, this research program will facilitate the creation of low-cost, small form factor wireless sensors that can be used in a variety of environments and applications, yielding advances in the fields of MEMS, energy harvesting, sensing, low-power ICs and integration, which represent significant contributions to research in Canada. These new sensors will have an overarching applicability and impact in sectors such as transportation, healthcare, environment and industrial processes, strengthening Canada's competitiveness. The 10 HQP trained during the research program (2 BEng, 3 MASc, 5 PhD) will gain valuable and marketable advanced manufacturing and design skills for the Canadian economy.

像集成电路（ICS）一样，微机电系统（MEMS）是一种破坏性技术，增强了系统并启用了新应用。 MEMS市场的增长速度越来越高，预计从2014年的11B美元增加到2020年的21B美元[Yole，2015年]。最近，MEMS传感器的存在增加，特别是可穿戴设备（例如智能手表，健身追踪器）和传感器节点（例如跟踪，天气预报），其中许多传感器都组合在一起。这需要更严格的集成以允许更紧凑的系统，并且需要无线接口来传输传感器遥测并允许更多的机动性。此类传感器适合即将到来的事业，在该国际网络Internet上，有望在这种紧凑的MEMS传感器中启用所需的电路。然而，由于微观制造过程不兼容和特定的设计复杂性，与多个MEMS的单包集成仍然很困难。此外，由于有很大的推动将传感器部署到具有较小电池的设备中，因此能源效率不足，无法用于所需功能，因此能源效率正成为系统集成的关键挑战。可以通过减少无线和接口电子的功耗，并用能量收割机增强传感器的功耗来提高效率。 Nabki教授将通过追求3个短期研究目标来利用他的研究专业知识，最近的进步和独特的MEM，IC和集成技术来实现这一愿景：i）详细的MEMS传感器非常适合高于IC的集成和传感器融合； ii）研究高能节能接口和无线通信IC；和iii）探索混合机械能量收集器以提高传感器的能效。******最终，该研究计划将促进可在各种环境和应用中使用的低成本，小型无线传感器的创建，从而在MEMS，能源收获，传感，低功能IC和整合中产生大量研究，从而在各种环境和应用中产生进步，代表了Cancase Cancass的大量研究。这些新传感器将在运输，医疗保健，环境和工业流程等领域具有总体适用性和影响，从而增强了加拿大的竞争力。在研究计划期间接受培训的10个HQP（2 Beng，3 MASC，5博士学位）将为加拿大经济获得有价值且可销售的先进制造和设计技能。