Design of Silicon Carbide Surface-Micromachined Capacitive-based Transducers for Non-Destructive Testing Applications

用于无损检测应用的碳化硅表面微机械电容式传感器的设计

• 批准号: 508361-2017
• 负责人: Nabki, Frederic
• 金额: $ 0.91万
• 依托单位: École de technologie supérieure
• 依托单位国家: 加拿大
• 项目类别: Engage Plus Grants Program
• 财政年份: 2017
• 资助国家: 加拿大
• 起止时间: 2017-01-01 至 2018-12-31
• 项目状态: 已结题
• 来源: https://www.nserc-crsng.gc.ca/ase-oro/Details-Detailles_eng.asp?id=639555
• 关键词: Design; Silicon; Carbide; Surface; Micromachined

Ultrasonic transducers are seeing widespread use in low-intensity applications such as medical imaging,non-destructive testing and ranging, or in high-intensity ones like cleaning and liquid emulsification. Fordecades, piezoelectric transducers have been the workhorse in ultrasonics. However, micro-machinedcapacitive transducers are currently attracting significant interest. A unique advantage over their bulkpiezoelectric counterpart lies in their lower mechanical impedance, offering the potential for a betterimpedance match with low-density fluidic media such as air. The operation of such transducers is also muchless sensitive to temperature. Capacitive micromachined ultrasonic transducers (CMUTs) are usually integratedclosely with their interface electronic circuits forming complete stand-alone ultra-compact systems. This canallow ultrasonic systems to be integrated into handheld devices. The research group of Prof. Nabki hasdeveloped a novel Silicon Carbide CMUT, and demonstrated a proof of concept prototype showcasing thedevice's potential, and gaining the interest of Olympus Corporation, an international company with many R&Doperations in Canada. Olympus operates in industrial, medical and consumer markets, and specializes in optics,electronics and precision engineering, with products deployed in Canada and around the world. Notably,Olympus is a world-leading manufacturer of innovative non-destructive testing (NDT) instruments that areused in industrial and research applications. It has a large operation in Quebec City of about 400 people, whichhandles R & D and production.Throughout this Engage Plus project, Olympus is planning to expand its extensive testing plans of thepreviously fabricated CMUTs as part of a previous Engage project. The characterization will include flawdetection, beam profiling, and uniformity inspection. A second fabrication run will be performed to optimizethe CMUT's performance and durability. Finally, a demonstration kit will be developed for a smartphone thatincludes both the 5 MHz and 15 MHz CMUTs. This project will provide training for two Ph.D. students.

超声波传感器在低强度的应用中广泛使用，例如医学成像，非破坏性测试和范围，或在清洁和液体乳化等高强度的应用中使用。 Fordecades，压电传感器一直是超声波的主力。但是，微电压球能传感器目前引起了重大兴趣。与其批量电离对应物相比，一个独特的优势在于它们的机械阻抗，为与空气等低密度液体介质（如空气）（如空气）（例如空气）提供了更好的阻力匹配的潜力。这种传感器的操作也对温度敏感。电容性微机械超声传感器（CMUT）通常与它们的界面电子电路集成在一起，形成完整的独立超紧凑系统。这种可以将超声系统集成到手持设备中。 Nabki教授的研究小组Hosdevevence开发了一种新颖的碳化物CMUT，并展示了概念验证原型，展现了Thedevice的潜力，并获得了在加拿大拥有许多R＆掺杂的国际公司Olympus Corporation的兴趣。 Olympus在工业，医疗和消费市场中运营，专门从事光学，电子和精确工程，并在加拿大和世界各地部署了产品。值得注意的是，Olympus是创新非破坏性测试（NDT）仪器的世界领先的制造商，这些仪器在工业和研究应用中使用。它在魁北克市拥有大约400人的大量运营，可以进行研发和生产。这项参与Plus Project，Olympus计划扩大其广泛的测试计划，作为先前参与项目的一部分。表征将包括缺陷挖出，梁分析和均匀性检查。将进行第二次制造运行，以优化CMUT的性能和耐用性。最后，将为智能手机开发一个示范套件，其中包括5 MHz和15 MHz CMUTS。该项目将为两项博士提供培训。学生。