Strategies for the scalable fabrication, characterization and processing of graphene and other technologically important 2-D films

石墨烯和其他技术上重要的二维薄膜的可扩展制造、表征和加工策略

• 批准号: 536629-2018
• 负责人: Knights, Andrew
• 金额: $ 4.13万
• 依托单位: McMaster University
• 依托单位国家: 加拿大
• 项目类别: Collaborative Research and Development Grants
• 财政年份: 2020
• 资助国家: 加拿大
• 起止时间: 2020-01-01 至 2021-12-31
• 项目状态: 已结题
• 来源: https://www.nserc-crsng.gc.ca/ase-oro/Details-Detailles_eng.asp?id=699286
• 关键词: Strategies; scalable; fabrication; characterization; processing

This proposal brings together the McMaster University Centre for Emerging Device Technologies (CEDT), the Canadian Centre for Electron Microscopy (CCEM) and the Canadian company, KennedyLabs, in an effort to move forward significantly attempts to commercialize the extraordinary properties of graphene. The team will work on three connected themes: (1) CMOS compatible fabrication technologies; (2) Characterization of 2-D structures; (3) Graphene processing for integrated device development. (1) We will investigate growth processes centered on ion beam synthesis of the graphene itself, or the substrate upon which CVD growth will take place, and through large area low-temperature processes, specifically Plasma-Enhanced CVD. The aim is to establish a unique fabrication process that can be incorporated into standard semiconductor processing steps. (2) We will use polymer-free transfer and imaging using aberration-corrected scanning transmission electron microscopy (STEM). (3)The application of graphene has been assumed to begin with the exploitation of its high mobility in transistor devices. However, the zero bandgap at the Dirac inflexion point of monolayer graphene prevents fabrication of electronic devices with low "off" current. We will build on themes (1) and (2) and demonstrate integrated devices. We will address the requirement for bandgap engineering for active device development of Field Effect Transistors (gFETs) and photodetectors. We will also use integrated silicon photonic device development as a platform for technology demonstration. The processes, devices and characterization protocols developed in this work will be exploited by the industrial partner KennedyLabs. Immediate benefits to Canada will arise in the form of increased revenue (and thus job creation) for KennedyLabs, while know-how and Intellectual Property (IP) will remain wholly Canadian owned. The work will further establish Canada's credentials in the exploitation of advanced materials, and specifically in 2-D structures such as graphene.

该提案汇集了麦克马斯特大学新兴设备技术中心（CEDT），加拿大电子显微镜中心（CCEM）和加拿大公司KennedyLabs，努力推进石墨烯非凡特性商业化的重大尝试。该团队将研究三个相关主题：(1)CMOS兼容制造技术；(2)二维结构表征；(3)集成器件开发石墨烯工艺。