本项目根据微电子和光电子产品制造对大尺寸超薄柔性显示衬底的加工精度、加工表面质量和加工效率的要求，针对目前加工中所存在的起皱、加工效率低、加工成本高、材料去除均匀度难以控制等问题，实现与后续电子器件制程无缝对接，提出大尺寸超薄不锈钢柔性显示衬底卷对卷（Roll-to-Roll）连续高效无应力超精密化学机械平坦化新方法；根据超薄不锈钢柔性衬底的物理、化学及机械特性，研究Roll-to-Roll化学机械平坦化中运动学特性、微观力学行为、物理化学效应、流体动压效应及机械摩擦特性，分析不锈钢柔性显示衬底表面材料去除机理、表面变形规律以及表面损伤的产生机理，研究适用于大尺寸超薄柔性显示衬底的Roll-to-Roll连续高效无应力化学机械平坦化加工专用装置、专用高效抛光液、适用抛光垫、界面温度检测装置等，研究大尺寸超薄不锈钢柔性显示衬底Roll-to-Roll超精密高效化学机械平坦化加工工艺。

According to the requirements for flexible display substrate on the machining accuracy, the surface quality and the machining efficiency in manufacturing the microelectronics and optoelectronics products, the new high efficiency technology of ultra-precision chemical machanical planarization (CMP) large-size and ultra-thin stainless steel flexible display substrates used Roll-to-Roll method with more than one polishing platen (or roller) under a single installation has been put forward based on these problems of puckering, the low machining efficiency, the high cost and the difficult controlling of the material removal uniformity. This method can match with the subsequent Roll-to-Roll manufacture procedure of electronic device completely. According to the physical properties, chemical properties, and the mechanical properties of stainless steel flexible display substrates, the kinematic properties, the micro-mechanical behavior, the physical and chemical effects, hydrodynamic effects and mechanical friction will be studied. The material removal mechanism, the surface deformation law and surface damage mechanism will be analyzed and the technology of controlling the surface damage and obtaining the high quality surface will be put forward under the field of mechanical and chemical energy in Roll-to-Roll CMP process of the large-size and ultra-thin stainless steel flexible display substrates. The Roll-to-Roll CMP machine, high efficiency Roll-to-Roll CMP slurry, appropriate Roll-to-Roll CMP pad, the equipment of measuring the fluid pressure and temperature and other key technology will be studied and manufactured. The machining process with high precision and damage free will be studied in Roll-to-Roll CMP the large-size and ultra-thin stainless steel flexible display substrates.