本项目创新性提出了基于电解液-氧化物-半导体（EOS）结构单向导电特性的微/纳流控器件设计思想与方法，旨在通过EOS结构的单向导电特性检测微/纳流体环境中的化学信号，或者控制微流体液滴的形貌和运动。本项目将深入研究EOS结构单向导电特性的机理，以及氧化物层材料、加工工艺、结构参数、表面纳米结构等对该特性的影响，建立物理模型；利用EOS结构单向导电特性对微/纳流体环境化学信号的响应，设计并加工实现新型生化分子/离子检测器件，探索单一样品或多种样品的在片、同时、实时检测；利用EOS结构单向导电特性对微流体环境电解现象的控制，设计并加工实现新型表面微液滴控制器件，探索对微结构表面亲疏水性的调谐，以及对微液滴形貌和运动的控制。该创新性微/纳流控器件设计思想与方法的提出和建立，突破了传统上仅把氧化物层作为电隔离层应用的限制，为新概念微/纳流控器件以及芯片微全分析系统的设计和制造开辟了一条新道路。

This project presents ideas and design methods for new type micro/nano-fluidic devices based on one-way conductive characteristic of electrolyte-oxide-semiconductor (EOS) structures, intending to detect biochemical signals in micro/nano-fluidic environments as well as to actuate micro-droplets by the one-way conductive characteristic of EOS structures. This project will delve in the mechanism of the one-way conductive characteristic of EOS structures, the influences of oxide materials, fabrication process, structural parameters and surface nano-structures on this characteristic, and relavent physical model building. By taking advantage of the significant response of the one-way conductive characteristic of EOS structures to the biochemical signals in micro/nano-fluidic environments, this project will design and fabricate new type biochemical molecular/ionic sensors, exploring on-chip real-time detection of single-sample or multi-samples. By making use of controlling microfluidic electrolysis by the one-way conductive characteristic of EOS structures, this project will also design and fabricate new type surface micro-droplet actuators, exploring the wetting switching on micro-machining surface, and motion control of micro-droplets. The ideas and design methods of these new type micro/nano-fluidic devices break through the restriction of using oxide layer as electrical isolation component, initiating a new research area for micro/nano-fluidic devices and Micro Total Analysis Systems technology.