在金属微纳结构表面光激发的局域表面等离激元（LSP）-传导表面等离激元（SPP）耦合效应可以有效将光束缚在纳米尺度，引发金属与介质界面非常强的表面局域近场增强，可用于痕量物质的高灵敏度传感检测。本项目创新性地从LSP-SPP耦合效应理论出发，研究依赖于相关结构微环境介质折射率的免疫检测传感方法，构建LSP-SPP耦合微流体传感器件；并创新性提出基于EBL-ICP工艺Scallop效应加工三维镂空纳米阵列结构的方法，研究运用这种新工艺方法加工"金属纳米阵列-间隔层-金属薄膜"LSP-SPP光学耦合基本结构，研究该基本结构的材料和空间参数对LSP-SPP电磁模耦合的影响，有效调控表面等离激元共振（SPR）激发和耦合效率，实现LSP-SPP耦合传感原理及器件，探索免疫检测技术对土壤水质环境持久性有机污染物的痕量实时分析。本研究为SPR光学调控规律的认识及其在芯片微全分析系统上的应用开辟了道路。

The coupling effect between localized-surface-plasmon (LSP)and surface-plasmon-polariton (SPP) is excited on the surface of metal micro-nano structure, and can confine light to nanoscale area effectively, resulting in strong surface near-field enhancement for high sensitive detection of trace. Innovatively, from the LSP-SPP coupling theory of the metal array nanostructures, this project will investigate the immunoassay detection depending on the refractive index of the micro-environment induced by the coupling structure, and construct LSP-SPP coupling microfluidic sensors. A fabrication method based on the Scallop effect in EBL-ICP process is proposed creatively to produce 3D hollow-carved array structures. Using this new method, the core structure of the LSP-SPP optical coupling structure, consisting of three up-down parts: nanoarray architecture, spacer layer, and metal film, will be fabricated. Furthermore, the project will study the influence of the core structure's material and space parameters on the electromagnetic mode of LSP-SPP coupling structure to control the exciting and coupling rate of SPR efficiently and realize the principle and devices of the LSP-SPP coupling sensors. By employing the obtained sensors, we will also explore the real-time immunoassay detection of the persistent organic pollutants in water, soil, or other environments. The processing method of LSP-SPP coupling sensors and related periodic 3D hollow-carved array structures to be presented here provides a new way for understanding the mechanism of SPR optical-controlled detection and application on the miniaturized total analysis systems on a chip.