多场复合微细结构表面抛光新工艺及其关键基础问题研究

微细结构表面由于具有传统表面所不具备的特性和功能，已在国防、光学、微流体以及表面工程等领域被广泛应用。目前，对于制造几十到上百微米尺寸的微细结构，考虑到加工成本、效率以及灵活性，精密机械加工技术被主要采用。然而由于这些技术会造成表面/亚表面损伤，降低表面质量，因此后续的抛光工艺变得尤为重要。本项目针对现有微细结构抛光方法难以兼顾高效、高精度、高表面质量的难题，从工艺方法，机理以及技术应用三个方面展开研究。首先，提出多场复合（力、磁、化学）作用下的微细结构表面抛光新工艺。其次，研究微细结构表面抛光过程中的面形精度保持机制。然后阐明多场作用下的表面/亚表面损伤去除和抑制机理。最后，通过优化工艺参数应用于实际样件，从而有效解决微细结构抛光中的关键理论与技术问题。本项目的研究成果将为精密零件的高性能制造提供技术支撑，在国家重大需求和国民经济中发挥重要作用，具有重要的学术研究和实际应用。

Microstructured surfaces have been widely used in the field of national defense, optics, microfluidics, surface engineering, etc. owing to their unique characteristics and functions compared with the traditional surfaces. Currently, for fabricating microfeatures in size of tens to hundreds of micrometers, precision machining technologies are primarily employed considering machining cost, efficiency and flexibility. However, due to the limitation of the achievable surface quality attributed to defects such as burrs, tool marks and subsurface damages, a post-polishing process is therefore inevitable. To solve the problem that high efficiency, high accuracy and high surface quality cannot be all taken into account by the present polishing technology for microstructured surface, this project aims to conduct research work from the aspects of method, mechanism and applications. Firstly, a new multi-field coupling (mechanics, magnetic, chemical) polishing technology for micro-structured surface will be proposed. Next, the profile accuracy maintaining mechanism of microstructured surface under the multi-field coupling will be investigated. Then the removal and suppression mechanism of surface/subsurface defects will be illustrated. Finally, through the practical application of the technology using optimized process parameters, key theoretical and technical issues on microstructured surface polishing will be solved. The achievement of the research will provide as technical support for the high-performance manufacturing of precision parts. Meanwhile, it will greatly contribute to the national major needs and economy, and deliver important values to both academic research and practical applications.