目前光阴极电子源发射层均为薄膜结构，通过光注入来形成电子发射，为了满足电子束曝光、同步辐射光源等应用领域对新型电子源的迫切需求，本项目提出了一种电驱动变带隙AlGaAs/GaAs NEA阵列电子源，该电子源可利用晶体管驱动实现无需光照的电注入电子发射。本项目拟通过电驱动NEA电子源工作机理、能带结构以及电子输运特性的研究，建立电子源发射理论模型；采用模型进行器件参数设计，再利用外延生长与干法刻蚀相结合的方法制备变带隙AlGaAs/GaAs阵列，并在超高真空系统中进行激活；通过实验与理论结果的对比分析，对电子源材料参数与制备工艺进行优化，最终得到具有电驱动发射功能的变带隙AlGaAs/GaAs NEA阵列电子源。本项目设计思想融合了电子发射技术和微电子技术，是对现有光阴极电子源设计思想的一次突破，开辟了一条发射电子的新途径，对于丰富电子源类型和电子发射理论，拓展其应用领域具有积极意义。

The active layer materials used in photocathode electron sources are thin film materials. The electrons emitted into vacuum in these electron sources are excited by photons. To satisfy the urgent demand for new electron sources in application fields, such as electron beam lithography and synchrotron radiation light source, we design a new graded band-gap AlGaAs/GaAs wire-array NEA electron source driven by electrical current, in which the electrons (non-equilibrium carriers) emitted into vacuum are injected by applied voltage instead of light. In this project, the working mechanism, band structure, and electronic transport properties of a NEA electron source driven by electrical current will be investigated. Based on these investigations, we will establish an electron emission theory model for this electron source and then use the model to design and simulate the structure of electron sources. The graded band-gap AlGaAs/GaAs wire array will be fabricated by epitaxy and etching processes. The AlGaAs/GaAs wire-array NEA electron source will be prepared in an ultra-high vacuum activation chamber. Based on comparative analysis of these experimental and theoretical results, we will optimize the material parameters and fabrication process of electron sources, and finally achieve a wire-array NEA electron source driven by electrical current. The idea of this project combines photoemission technology and microelectronic technology, which is a breakthrough in the design of photocathode electron sources and provides a new approach to emit electrons. This research work will have important significance for enriching the electron emission theory and extending the application fields of electron sources.