微纳加工技术是当今高科技产业的关键技术，电化学方法在微纳加工技术占有重要的一席之地。但是由于对精密加工仪器平台及其控制系统、电化学去除速率与机械运动的耦合关系的研究匮乏，严重阻碍了电化学微纳加工产业化进程。针对上述关键问题，结合厦门大学在电化学微纳加工领域20年的积淀和申请者在该领域的研究经验，与哈尔滨工业大学精密工程研究所的强强联合，研制集成化电化学微纳加工仪器平台，并以此为依托，开展电化学微纳加工的理论和应用研究，具体包括：（1）微纳精度的机械操纵系统；（2）微纳位移在线监测系统；（3）电化学控制系统；（4）溶液循环及温控系统；（5）信息处理计算机软件系统；（6）电化学微纳加工体系反应动力学；（7）化学去除与机械运动的耦合关系。本研究将为电化学微纳加工理论与应用研究提供模块化设计的通用平台。

Micro/nano-fabrication is the key techniques for the edge of high-tech industries. Electrochemical methods play vital roles in the micro/nano-fabrications. However, the lacks of the instrumental platform of micro/nano-fabrication and thus the coupling effect between the chemical removal rate and the mechanical motion hinder the industrial procedure of electrochemical micro/nano-fabrication methods. Based on the 20 year’s accumulations of Xiamen University and the experience of the applier himself on the research of electrochemical micro/nano-fabrication, and the stern cooperation with the Center for Precision Engineering at Harbin Institute of Technology, we develop the electrochemical micro/nano-fabrication instrumental platform, with which the theories and applications of electrochemical micro/nano- fabrications will be investigated, including: (1) mechanical operation system with nanometer resolution; (2) in-situ monitoring system for the nanometer replacement; (3) electrochemical modulate system; (4) electrolyte recirculation and temperature control system; (5) information processing computer system; (6) Electrochemical reactive kinetics; (7) the coupling effect between the chemical removal rate and mechanical motions. Our aim is to provide a modularized and universal research platform for the theories and applications of electrochemical electrochemical micro/nano-fabrication.