REU: Study of a Surface Acoustic Wave Microsensor for Gas Detection

这项研究的目的是加深对 表面声波（SAW）微传感器用于气体检测。 的 所提出的传感器的潜在性能在部件的范围内 十亿分之一到万亿分之一。 该传感器将使用双 SAW延迟线，它将测量气体浓度作为函数， 参考延迟线和延迟线之间的频移 测试传感器包含选择性吸附膜。 的 跨学科研究工作将包括开发 声表面波器件的理论、设计、制造和测试，以及物理学 以及实现这种潜力所需的表面化学 的传感器。

This research is aimed at developing an improved understanding of surface acoustic wave (SAW) microsensors for gas detection. The potential performance of the proposed sensor is in the range of parts per billion to parts per trillion. The proposed sensor will use twin SAW delay lines, and it will measure gas concentration as a function of the frequency shift between the reference delay line and the delay line of the test sensor containing a selectively sorbent film. The interdisciplinary research effort will include development of the theory, design, fabrication, and testing of SAW devices, and the physics and chemistry of surfaces needed to realize the potential of this type of sensor.