Travel to Attend: 32nd International Symposium on Electron,Ion and Photon Beams, Fort Lauderdale, Florida May 31 - June 2, 1988

这笔拨款将促进大学更多地参与将于1988年5月31日至6月3日在佛罗里达州劳德代尔堡举行的第32届电子、离子和光子光束国际研讨会。这是关于微加工的杰出会议；这是一个跨学科的会议，以一种很少有其他会议的方式关注高分辨率光刻，干蚀刻转移，材料科学，表面化学和降维创新设备的补充。还有其他会议分别讨论每个主题领域，在某种程度上，但没有强调微结构科学进步的微加工。本次会议的一个重要特点是在真空科学与技术杂志上所有被接受的论文的档案出版；因此，我们可以向广大听众传播这次会议的重要成果。

This grant will facilitate increased University participation in the 32nd International Symposium on Electron, Ion and Photon Beams, to be held May 31 -June 3, 1988 in Fort Lauderdale, Florida. This is the outstanding conference on microfabrication; it is a cross-disciplinary conference that focuses in a way that few other conferences do on the complement of high resolution lithography, dry etch transfer, materials science, surface chemistry and innovative devices of reduced dimension. There are other conferences that address each of the subject areas separately, and to some extent, but not with the emphasis on microfabrication for the advancement of the science of microstructures. An important feature that distinguishes this conference is the archival publication of all accepted papers in the Journal of Vacuum Science and Technology; we may thus disseminate the important results of this conference to a wide audience.