Self-Assembling Microstructures with Application to Precision Resonant-Structure Micromotors

本研究旨在开发和展示允许在微机制中控制组分间间隙的表面微结构。这些自组装微结构（SAMS）通过在基板平面上移动元件来消除不希望的间隙并提供可控的预加载力。提出了一种制造工艺，该工艺建立在规定的弯矩中，以在从基材释放时驱动弯曲。指间指间指通过局部电阻加热产生静电力用于组件组装。提出了一种四爪谐振微电机作为研究工具，用于在微动力系统中演示SAMS概念。

This research aims to develop and demonstrate surface microstructures that allow the control of inter-component clearances in micromechanisms. These self-assembling microstructures (SAMS) operate by moving elements in the plane of the substrate both to eliminate undesirable clearances and to provide controlled pre-load forces. A fabrication process is proposed that builds in prescribed bending moments to actuate flexures upon release from the substrate. Interdigitated fingers are used to generate electrostatic forces for component assembly by local resistive heating. A four-pawl resonant micromotor is proposed as a research vehicle for demonstrating SAMS concepts in a microdynamic system.