Presidential Young Investigator Award: Magnetic Suspension Control of Precision Motion

磁悬浮技术是非常有前途的 精密运动控制，因为它们消除了高表面 传统机械轴承的光洁度要求，并允许 舞台动力的直接控制。 这个项目的目标是 研究用于精密运动的磁悬浮技术 控制在纳米级。 要达到这样的业绩 需要在传感器、机械设计和设计方面取得进展， 电磁执行器的控制。 初步实验工作 将专注于设计和建造一个原型线性 轴承和电机系统，旨在实现一个纳米 分辨率为50毫米。 设想的应用 开发技术的领域是精密平台， 光刻、扫描探针显微镜和其他精密 制造任务。

Magnetic suspension techniques are quite promising for the control of precision motion, since they eliminate the high surface finish requirements of traditional mechanical bearings, and allow the direct control of stage dynamics. The goal of this project is to investigate magnetic suspension techniques for precision motion control at the nanometer level. To achieve such performance requires advances in sensors, mechanical design, and the design and control of electromagnetic actuators. Initial experimental effort will focus on the design and construction of a prototype linear bearing and motor system which is designed to achieve one nanometer resolution with a travel of 50 millimeters. Envisioned application areas for the developed technology are precision stages for photolithography, scanned probe microscopy, and other precision manufacturing tasks.