SGER: Manufacturing Massively Parallel Microelectro- mechanical Arrays for Macroscopic Actuation

小行星9317937 该奖项旨在研究利用半导体制造技术制造大规模并行微机电系统的问题。 静电致动隔膜阵列已通过此类工艺制造，并将评估致动器机械特性和工艺成品率。 还将研究通过精密金刚石研磨在这种多致动器晶片上生产光学质量表面，因为要研究的初始应用是望远镜的自适应光学补偿。 研究的成功完成将使精确，精细，分布式驱动，这将有利于各种应用。 这种应用的例子是用于望远镜的自适应光学补偿的多区域可变形反射镜，以及用于在半导体、生物医学和化学应用中精确控制非常低的液体流速的多门流量控制阀。

9317937 Bifano The award is for investigating issues in the manufacture of massively parallel, microelectromechanical systems by using semiconductor fabrication technology. Arrays of electrostatically actuated diaphragms have been manufactured by such a process, and will be evaluated for actuator mechanical characteristics and process yield. The production of optical quality surfaces on such multi actuator wafers by precision diamond grinding will also be investigated, as the initial application to be investigated is adaptive optical compensation of telescopes. Successful completion of the research would enable precise, fine, distributed actuation which would benefit a variety of applications. Examples of such applications are a multi zone deformable mirror to be used for adaptive optical compensation of telescopes, and multi gate flow control valve for precise control of very low liquid flow rates in semiconductor, biomedical and chemical applications.