Numerical and Parametric Modeling of Piezoelectric Thin-Film Resonators

9412644这项研究将支持摩托罗拉公司企业研究实验室GOALI计划下的工程系实习。研究的主要目标是促进设计和制造压电薄膜谐振器的最先进知识。该项目将补充摩托罗拉公司凤凰企业研究实验室正在进行的薄膜设备实验研究计划。摩托罗拉公司的首席研究员是Luke Mang先生。这项工作将分两个阶段进行：(I)研究和开发压电薄膜谐振器的有限元程序；(Ii)利用摩托罗拉公司的实验研究结果和在第一阶段建立的数值模型对薄膜谐振器进行参数研究。***

9412644 Yong This research will support an Engineering Faculty Internship under the GOALI program at the Corporate Research Laboratories of Motorola, Inc. The primary objective of the research is to advance the state of the art knowledge in designing and fabricating piezoelectric thin film resonators. The project will complement an on-going experimental research program on thin film devices at the Phoenix Corporate Research Laboratories of Motorola, Inc. The principal investigator at Motorola, Inc. is Mr. Luke Mang. The proposed work will be performed in two phases: (I) research and development of finite element programs for piezoelectric thin film resonators, and (II) parametric study of thin film resonators using the results of experimental research at Motorola, Inc. and the numerical models developed in phase I. The impact of the proposed work is a better analysis/design tool for piezoelectric thin film resonators. ***