Undergraduate Microelectronics Processing Lab: An Ideal Setting for Synthesis and Processing

小行星9450876 该项目的重点是加强加州理工学院在先进材料合成和加工领域的材料工程教育。我们将利用这笔拨款购买一套溅射系统和一台椭圆偏振仪，以完成微电子加工实验室所需的仪器。 微电子加工是了解材料加工与所得性能之间关系的理想环境：所用材料（如硅）具有对加工条件高度敏感的性能，清楚地表明了加工条件与材料性能之间的联系。微电子加工也使材料工程专业的学生接触到一系列工程材料，包括聚合物、陶瓷和金属。

9450876 Vanasupa This project focusses on enhancing materials engineering education at Cal Poly in the area of advanced materials synthesis and processing. With the funds provided by this grant, we will purchase a sputtering system and an ellipsometer to complete the instrumentation required for a microelectronics processing lab. Microelectronics processing is an ideal setting for learning the relationship between materials processing and the resulting properties: the materials used, like silicon, have properties that are highly sensitive to processing conditions, clearly demonstrating the link between the processing conditions and the material properties. Microelectronics processing also exposes the materials engineering student to a spectrum of engineering materials, involving polymers, ceramics and metals.