Helicon Wave Studies

项目编号：ECS-9529565项目负责人：Noah Hershkowitz/University of Wisconsin题目：Helicon Wave Studies本研究将开发一种高密度的Helicon等离子体源。螺旋等离子体源有望成为半导体等离子体加工中密度最高的等离子体源。在这些实验中，高密度螺旋源将通过使用增加的射频功率和多个天线来产生，以有效地耦合到螺旋色散关系的所有区域：一个天线在无碰撞状态下低功率工作以启动等离子体，另一个天线在碰撞状态下以更高功率工作以增加螺旋等离子体密度。50kw rf的短脉冲（10ms）将通过第二个天线注入低功率稳态，以获得1014 cm-3的密度。除了提供高密度大体积等离子体源外，这些实验还将在尚未充分探索的情况下测试参数缩放和物理模型。m=-1模式的不出现，这是一个开放的基本问题，将特别探讨使用设计用于强制其产生的天线配置。拟议研究的一个非常重要的部分是开发这种高密度等离子体所需的新诊断方法。这些实验的诊断将包括用于电子温度测量的红宝石激光汤普森散射系统，以取代无法在实验条件下工作的朗缪尔探测器；以及从Phaedrus-B串联反射镜中获得的微波干涉测量系统，用于测量波的色散。分段端点损耗探测器、延迟场能量分析仪和铂网格辐射计探测器将为确定高密度脉冲等离子体的功率缩放和功率平衡提供数据。

Proposal Number: ECS-9529565 Principal Investigator: Noah Hershkowitz/University of Wisconsin Title: Helicon Wave Studies In this research, a high density helicon plasma source will be developed. The helicon plasma source is anticipated as the highest density plasma source for semiconductor plasma processing applications. In these experiments the high density helicon source will be generated through use of increased rf-power and multiple antennas to couple efficiently to all regimes of the helicon dispersion relation: one antenna for low power operation in the collisionless regime to initiate the plasma and a second antenna operating at higher power to increase helicon plasma density in the collisional regime. A short pulse (10 ms) of 50 kW of rf will be injected via the second antenna into a low power steady state to obtain densities of 1014 cm-3. In addition to providing a high density large volume plasma source, these experiments will test the parameter scalings and physical models in regimes not fully explored. The non-appearance of the m=-1 mode, an open fundamental question, will be especially explored using an antenna configuration designed to force its generation. A very important part of the proposed research is the development of new diagnostics needed for such high density plasmas. Diagnostics for these experiments will include a ruby laser Thompson scattering system for electron temperature measurements, to replace the Langmuir probes which would not operate under the experimental conditions; and a microwave interferometry system available from he Phaedrus-B Tandem mirror to allow measurement of wave dispersion. Segmented endloss detectors, retarding field energy analyzers, and Pt grid bolometric radiation detectors will provide data to determine power scaling and power balance of the high density pulsed plasma.